JPS5514870B2 - - Google Patents
Info
- Publication number
- JPS5514870B2 JPS5514870B2 JP2714174A JP2714174A JPS5514870B2 JP S5514870 B2 JPS5514870 B2 JP S5514870B2 JP 2714174 A JP2714174 A JP 2714174A JP 2714174 A JP2714174 A JP 2714174A JP S5514870 B2 JPS5514870 B2 JP S5514870B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2714174A JPS5514870B2 (https=) | 1974-03-11 | 1974-03-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2714174A JPS5514870B2 (https=) | 1974-03-11 | 1974-03-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50120969A JPS50120969A (https=) | 1975-09-22 |
| JPS5514870B2 true JPS5514870B2 (https=) | 1980-04-19 |
Family
ID=12212758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2714174A Expired JPS5514870B2 (https=) | 1974-03-11 | 1974-03-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5514870B2 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50140362U (https=) * | 1974-05-07 | 1975-11-19 | ||
| JPS585986B2 (ja) * | 1977-07-05 | 1983-02-02 | 松下電器産業株式会社 | 蒸着電極装着用治具への基板装填方法 |
| JPS5617488Y2 (https=) * | 1978-04-28 | 1981-04-23 | ||
| JPS58143547A (ja) * | 1982-02-22 | 1983-08-26 | Toshiba Corp | ウエ−ハの支持治具 |
-
1974
- 1974-03-11 JP JP2714174A patent/JPS5514870B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50120969A (https=) | 1975-09-22 |