JPS5514870B2 - - Google Patents

Info

Publication number
JPS5514870B2
JPS5514870B2 JP2714174A JP2714174A JPS5514870B2 JP S5514870 B2 JPS5514870 B2 JP S5514870B2 JP 2714174 A JP2714174 A JP 2714174A JP 2714174 A JP2714174 A JP 2714174A JP S5514870 B2 JPS5514870 B2 JP S5514870B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2714174A
Other languages
Japanese (ja)
Other versions
JPS50120969A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2714174A priority Critical patent/JPS5514870B2/ja
Publication of JPS50120969A publication Critical patent/JPS50120969A/ja
Publication of JPS5514870B2 publication Critical patent/JPS5514870B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2714174A 1974-03-11 1974-03-11 Expired JPS5514870B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2714174A JPS5514870B2 (enrdf_load_stackoverflow) 1974-03-11 1974-03-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2714174A JPS5514870B2 (enrdf_load_stackoverflow) 1974-03-11 1974-03-11

Publications (2)

Publication Number Publication Date
JPS50120969A JPS50120969A (enrdf_load_stackoverflow) 1975-09-22
JPS5514870B2 true JPS5514870B2 (enrdf_load_stackoverflow) 1980-04-19

Family

ID=12212758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2714174A Expired JPS5514870B2 (enrdf_load_stackoverflow) 1974-03-11 1974-03-11

Country Status (1)

Country Link
JP (1) JPS5514870B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50140362U (enrdf_load_stackoverflow) * 1974-05-07 1975-11-19
JPS585986B2 (ja) * 1977-07-05 1983-02-02 松下電器産業株式会社 蒸着電極装着用治具への基板装填方法
JPS5617488Y2 (enrdf_load_stackoverflow) * 1978-04-28 1981-04-23
JPS58143547A (ja) * 1982-02-22 1983-08-26 Toshiba Corp ウエ−ハの支持治具

Also Published As

Publication number Publication date
JPS50120969A (enrdf_load_stackoverflow) 1975-09-22

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