JPS55144232A - Holography exposure device - Google Patents

Holography exposure device

Info

Publication number
JPS55144232A
JPS55144232A JP5240279A JP5240279A JPS55144232A JP S55144232 A JPS55144232 A JP S55144232A JP 5240279 A JP5240279 A JP 5240279A JP 5240279 A JP5240279 A JP 5240279A JP S55144232 A JPS55144232 A JP S55144232A
Authority
JP
Japan
Prior art keywords
hologram
patterns
computer
exposure device
redundancy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5240279A
Other languages
Japanese (ja)
Inventor
Shigeru Kogure
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP5240279A priority Critical patent/JPS55144232A/en
Publication of JPS55144232A publication Critical patent/JPS55144232A/en
Pending legal-status Critical Current

Links

Landscapes

  • Holo Graphy (AREA)
  • Projection-Type Copiers In General (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)

Abstract

PURPOSE: To obtain the exposure device which is difficult to receive the influence of defects, dust, dirt, etc. by using computer holograms and optical systems such as lasers, beam expanders and making use of the redundancy of holography.
CONSTITUTION: The light out from a laser 27 is expanded of its luminous flux by a beam expander 28 and radiates a computer hologram 29. The real image 31 of patterns is reconstructed on a wafer 30 and the patterns are formed on the wafer 30. Since the hologram 29 has redundancy, the influence of the defects, dust, dirt, etc. on the hologram does not appear on the reconstructed image 31. With the computer hologram, the information of the patterns is input by coondinates into a computer 32, then high-speed Fourier transformation takes place and the interference patterns on the hologram are calculated and these are drawn by a plotter 33 and the original picture 34 thus made is subjected to photographic reduction, whereby it is completed.
COPYRIGHT: (C)1980,JPO&Japio
JP5240279A 1979-04-27 1979-04-27 Holography exposure device Pending JPS55144232A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5240279A JPS55144232A (en) 1979-04-27 1979-04-27 Holography exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5240279A JPS55144232A (en) 1979-04-27 1979-04-27 Holography exposure device

Publications (1)

Publication Number Publication Date
JPS55144232A true JPS55144232A (en) 1980-11-11

Family

ID=12913798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5240279A Pending JPS55144232A (en) 1979-04-27 1979-04-27 Holography exposure device

Country Status (1)

Country Link
JP (1) JPS55144232A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62141559A (en) * 1985-12-16 1987-06-25 Mitsubishi Electric Corp Projection exposure device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62141559A (en) * 1985-12-16 1987-06-25 Mitsubishi Electric Corp Projection exposure device

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