JPS5514140B2 - - Google Patents

Info

Publication number
JPS5514140B2
JPS5514140B2 JP317776A JP317776A JPS5514140B2 JP S5514140 B2 JPS5514140 B2 JP S5514140B2 JP 317776 A JP317776 A JP 317776A JP 317776 A JP317776 A JP 317776A JP S5514140 B2 JPS5514140 B2 JP S5514140B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP317776A
Other languages
Japanese (ja)
Other versions
JPS5286983A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP317776A priority Critical patent/JPS5286983A/ja
Publication of JPS5286983A publication Critical patent/JPS5286983A/ja
Publication of JPS5514140B2 publication Critical patent/JPS5514140B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP317776A 1976-01-16 1976-01-16 Ion plating apparatus Granted JPS5286983A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP317776A JPS5286983A (en) 1976-01-16 1976-01-16 Ion plating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP317776A JPS5286983A (en) 1976-01-16 1976-01-16 Ion plating apparatus

Publications (2)

Publication Number Publication Date
JPS5286983A JPS5286983A (en) 1977-07-20
JPS5514140B2 true JPS5514140B2 (US06420036-20020716-C00037.png) 1980-04-14

Family

ID=11550095

Family Applications (1)

Application Number Title Priority Date Filing Date
JP317776A Granted JPS5286983A (en) 1976-01-16 1976-01-16 Ion plating apparatus

Country Status (1)

Country Link
JP (1) JPS5286983A (US06420036-20020716-C00037.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018037819A1 (ja) 2016-08-23 2018-03-01 小林 光 配合物及びその製造方法、並びに水素供給方法
WO2019021769A1 (ja) 2017-07-27 2019-01-31 国立大学法人大阪大学 薬剤及びその製造方法
WO2020152985A1 (ja) 2019-01-24 2020-07-30 国立大学法人大阪大学 薬剤及びその製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4974178A (US06420036-20020716-C00037.png) * 1972-11-18 1974-07-17

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4974178A (US06420036-20020716-C00037.png) * 1972-11-18 1974-07-17

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018037819A1 (ja) 2016-08-23 2018-03-01 小林 光 配合物及びその製造方法、並びに水素供給方法
WO2019021769A1 (ja) 2017-07-27 2019-01-31 国立大学法人大阪大学 薬剤及びその製造方法
WO2020152985A1 (ja) 2019-01-24 2020-07-30 国立大学法人大阪大学 薬剤及びその製造方法

Also Published As

Publication number Publication date
JPS5286983A (en) 1977-07-20

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