JPS55139167U - - Google Patents

Info

Publication number
JPS55139167U
JPS55139167U JP3950979U JP3950979U JPS55139167U JP S55139167 U JPS55139167 U JP S55139167U JP 3950979 U JP3950979 U JP 3950979U JP 3950979 U JP3950979 U JP 3950979U JP S55139167 U JPS55139167 U JP S55139167U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3950979U
Other languages
Japanese (ja)
Other versions
JPS6214128Y2 (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1979039509U priority Critical patent/JPS6214128Y2/ja
Publication of JPS55139167U publication Critical patent/JPS55139167U/ja
Application granted granted Critical
Publication of JPS6214128Y2 publication Critical patent/JPS6214128Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP1979039509U 1979-03-27 1979-03-27 Expired JPS6214128Y2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979039509U JPS6214128Y2 (cg-RX-API-DMAC10.html) 1979-03-27 1979-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979039509U JPS6214128Y2 (cg-RX-API-DMAC10.html) 1979-03-27 1979-03-27

Publications (2)

Publication Number Publication Date
JPS55139167U true JPS55139167U (cg-RX-API-DMAC10.html) 1980-10-03
JPS6214128Y2 JPS6214128Y2 (cg-RX-API-DMAC10.html) 1987-04-10

Family

ID=28906473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979039509U Expired JPS6214128Y2 (cg-RX-API-DMAC10.html) 1979-03-27 1979-03-27

Country Status (1)

Country Link
JP (1) JPS6214128Y2 (cg-RX-API-DMAC10.html)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5361532A (en) * 1976-11-16 1978-06-02 Mitsubishi Electric Corp Masking method
JPS5429573A (en) * 1977-08-10 1979-03-05 Hitachi Ltd Fine machining method of semiconductor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5361532A (en) * 1976-11-16 1978-06-02 Mitsubishi Electric Corp Masking method
JPS5429573A (en) * 1977-08-10 1979-03-05 Hitachi Ltd Fine machining method of semiconductor

Also Published As

Publication number Publication date
JPS6214128Y2 (cg-RX-API-DMAC10.html) 1987-04-10

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