JPS55139167U - - Google Patents

Info

Publication number
JPS55139167U
JPS55139167U JP3950979U JP3950979U JPS55139167U JP S55139167 U JPS55139167 U JP S55139167U JP 3950979 U JP3950979 U JP 3950979U JP 3950979 U JP3950979 U JP 3950979U JP S55139167 U JPS55139167 U JP S55139167U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3950979U
Other languages
Japanese (ja)
Other versions
JPS6214128Y2 (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1979039509U priority Critical patent/JPS6214128Y2/ja
Publication of JPS55139167U publication Critical patent/JPS55139167U/ja
Application granted granted Critical
Publication of JPS6214128Y2 publication Critical patent/JPS6214128Y2/ja
Expired legal-status Critical Current

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  • ing And Chemical Polishing (AREA)
JP1979039509U 1979-03-27 1979-03-27 Expired JPS6214128Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979039509U JPS6214128Y2 (OSRAM) 1979-03-27 1979-03-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979039509U JPS6214128Y2 (OSRAM) 1979-03-27 1979-03-27

Publications (2)

Publication Number Publication Date
JPS55139167U true JPS55139167U (OSRAM) 1980-10-03
JPS6214128Y2 JPS6214128Y2 (OSRAM) 1987-04-10

Family

ID=28906473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979039509U Expired JPS6214128Y2 (OSRAM) 1979-03-27 1979-03-27

Country Status (1)

Country Link
JP (1) JPS6214128Y2 (OSRAM)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5361532A (en) * 1976-11-16 1978-06-02 Mitsubishi Electric Corp Masking method
JPS5429573A (en) * 1977-08-10 1979-03-05 Hitachi Ltd Fine machining method of semiconductor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5361532A (en) * 1976-11-16 1978-06-02 Mitsubishi Electric Corp Masking method
JPS5429573A (en) * 1977-08-10 1979-03-05 Hitachi Ltd Fine machining method of semiconductor

Also Published As

Publication number Publication date
JPS6214128Y2 (OSRAM) 1987-04-10

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