JPS55137350U - - Google Patents

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Publication number
JPS55137350U
JPS55137350U JP4395380U JP4395380U JPS55137350U JP S55137350 U JPS55137350 U JP S55137350U JP 4395380 U JP4395380 U JP 4395380U JP 4395380 U JP4395380 U JP 4395380U JP S55137350 U JPS55137350 U JP S55137350U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4395380U
Other versions
JPS5939634Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980043953U priority Critical patent/JPS5939634Y2/ja
Publication of JPS55137350U publication Critical patent/JPS55137350U/ja
Application granted granted Critical
Publication of JPS5939634Y2 publication Critical patent/JPS5939634Y2/ja
Expired legal-status Critical Current

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  • Examining Or Testing Airtightness (AREA)
JP1980043953U 1980-04-03 1980-04-03 吸込式リ−ク試験装置 Expired JPS5939634Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980043953U JPS5939634Y2 (ja) 1980-04-03 1980-04-03 吸込式リ−ク試験装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980043953U JPS5939634Y2 (ja) 1980-04-03 1980-04-03 吸込式リ−ク試験装置

Publications (2)

Publication Number Publication Date
JPS55137350U true JPS55137350U (ja) 1980-09-30
JPS5939634Y2 JPS5939634Y2 (ja) 1984-11-06

Family

ID=28919340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980043953U Expired JPS5939634Y2 (ja) 1980-04-03 1980-04-03 吸込式リ−ク試験装置

Country Status (1)

Country Link
JP (1) JPS5939634Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0540071A (ja) * 1991-05-16 1993-02-19 Ulvac Japan Ltd ガス洩れ検査装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3342990A (en) * 1964-05-26 1967-09-19 Gca Corp Leak detection system which utilizes a sorption pump and a specific mass spectrometer detector

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3342990A (en) * 1964-05-26 1967-09-19 Gca Corp Leak detection system which utilizes a sorption pump and a specific mass spectrometer detector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0540071A (ja) * 1991-05-16 1993-02-19 Ulvac Japan Ltd ガス洩れ検査装置

Also Published As

Publication number Publication date
JPS5939634Y2 (ja) 1984-11-06

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