JPS55137350U - - Google Patents
Info
- Publication number
- JPS55137350U JPS55137350U JP4395380U JP4395380U JPS55137350U JP S55137350 U JPS55137350 U JP S55137350U JP 4395380 U JP4395380 U JP 4395380U JP 4395380 U JP4395380 U JP 4395380U JP S55137350 U JPS55137350 U JP S55137350U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1980043953U JPS5939634Y2 (ja) | 1980-04-03 | 1980-04-03 | 吸込式リ−ク試験装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1980043953U JPS5939634Y2 (ja) | 1980-04-03 | 1980-04-03 | 吸込式リ−ク試験装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55137350U true JPS55137350U (ja) | 1980-09-30 |
JPS5939634Y2 JPS5939634Y2 (ja) | 1984-11-06 |
Family
ID=28919340
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1980043953U Expired JPS5939634Y2 (ja) | 1980-04-03 | 1980-04-03 | 吸込式リ−ク試験装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5939634Y2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0540071A (ja) * | 1991-05-16 | 1993-02-19 | Ulvac Japan Ltd | ガス洩れ検査装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3342990A (en) * | 1964-05-26 | 1967-09-19 | Gca Corp | Leak detection system which utilizes a sorption pump and a specific mass spectrometer detector |
-
1980
- 1980-04-03 JP JP1980043953U patent/JPS5939634Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3342990A (en) * | 1964-05-26 | 1967-09-19 | Gca Corp | Leak detection system which utilizes a sorption pump and a specific mass spectrometer detector |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0540071A (ja) * | 1991-05-16 | 1993-02-19 | Ulvac Japan Ltd | ガス洩れ検査装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS5939634Y2 (ja) | 1984-11-06 |