JPS5513043B2 - - Google Patents

Info

Publication number
JPS5513043B2
JPS5513043B2 JP870574A JP870574A JPS5513043B2 JP S5513043 B2 JPS5513043 B2 JP S5513043B2 JP 870574 A JP870574 A JP 870574A JP 870574 A JP870574 A JP 870574A JP S5513043 B2 JPS5513043 B2 JP S5513043B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP870574A
Other languages
Japanese (ja)
Other versions
JPS50104686A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP870574A priority Critical patent/JPS5513043B2/ja
Publication of JPS50104686A publication Critical patent/JPS50104686A/ja
Publication of JPS5513043B2 publication Critical patent/JPS5513043B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
  • Feedback Control In General (AREA)
  • Control Of Fluid Pressure (AREA)
JP870574A 1974-01-19 1974-01-19 Expired JPS5513043B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP870574A JPS5513043B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-01-19 1974-01-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP870574A JPS5513043B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-01-19 1974-01-19

Publications (2)

Publication Number Publication Date
JPS50104686A JPS50104686A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-08-18
JPS5513043B2 true JPS5513043B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-04-05

Family

ID=11700340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP870574A Expired JPS5513043B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-01-19 1974-01-19

Country Status (1)

Country Link
JP (1) JPS5513043B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61145614A (ja) * 1984-12-20 1986-07-03 Ulvac Corp 圧力調節装置
JPS61149122A (ja) * 1984-12-21 1986-07-07 コーリン電子株式会社 血圧測定装置
JPH04362712A (ja) * 1991-06-10 1992-12-15 Tabai Espec Corp 真空制御装置

Also Published As

Publication number Publication date
JPS50104686A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-08-18

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