JPS5512676B2 - - Google Patents
Info
- Publication number
- JPS5512676B2 JPS5512676B2 JP12596772A JP12596772A JPS5512676B2 JP S5512676 B2 JPS5512676 B2 JP S5512676B2 JP 12596772 A JP12596772 A JP 12596772A JP 12596772 A JP12596772 A JP 12596772A JP S5512676 B2 JPS5512676 B2 JP S5512676B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12596772A JPS5512676B2 (ja) | 1972-12-15 | 1972-12-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12596772A JPS5512676B2 (ja) | 1972-12-15 | 1972-12-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4984210A JPS4984210A (ja) | 1974-08-13 |
| JPS5512676B2 true JPS5512676B2 (ja) | 1980-04-03 |
Family
ID=14923395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12596772A Expired JPS5512676B2 (ja) | 1972-12-15 | 1972-12-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5512676B2 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59158331U (ja) * | 1983-04-08 | 1984-10-24 | 沖電気工業株式会社 | 半導体基板の吸着台 |
| JPS6073239U (ja) * | 1983-10-25 | 1985-05-23 | 株式会社東芝 | 薄片状部材の保持治具 |
-
1972
- 1972-12-15 JP JP12596772A patent/JPS5512676B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59158331U (ja) * | 1983-04-08 | 1984-10-24 | 沖電気工業株式会社 | 半導体基板の吸着台 |
| JPS6073239U (ja) * | 1983-10-25 | 1985-05-23 | 株式会社東芝 | 薄片状部材の保持治具 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4984210A (ja) | 1974-08-13 |