JPS55119399A - Electron cyclotron resonance plasma generator - Google Patents

Electron cyclotron resonance plasma generator

Info

Publication number
JPS55119399A
JPS55119399A JP2595979A JP2595979A JPS55119399A JP S55119399 A JPS55119399 A JP S55119399A JP 2595979 A JP2595979 A JP 2595979A JP 2595979 A JP2595979 A JP 2595979A JP S55119399 A JPS55119399 A JP S55119399A
Authority
JP
Japan
Prior art keywords
plasma generator
cyclotron resonance
electron cyclotron
resonance plasma
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2595979A
Other languages
Japanese (ja)
Other versions
JPS5837680B2 (en
Inventor
Yuuichi Sakamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN Institute of Physical and Chemical Research
Original Assignee
RIKEN Institute of Physical and Chemical Research
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN Institute of Physical and Chemical Research filed Critical RIKEN Institute of Physical and Chemical Research
Priority to JP54025959A priority Critical patent/JPS5837680B2/en
Publication of JPS55119399A publication Critical patent/JPS55119399A/en
Publication of JPS5837680B2 publication Critical patent/JPS5837680B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
JP54025959A 1979-03-06 1979-03-06 Electron cyclotron resonance plasma generator Expired JPS5837680B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54025959A JPS5837680B2 (en) 1979-03-06 1979-03-06 Electron cyclotron resonance plasma generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54025959A JPS5837680B2 (en) 1979-03-06 1979-03-06 Electron cyclotron resonance plasma generator

Publications (2)

Publication Number Publication Date
JPS55119399A true JPS55119399A (en) 1980-09-13
JPS5837680B2 JPS5837680B2 (en) 1983-08-17

Family

ID=12180276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54025959A Expired JPS5837680B2 (en) 1979-03-06 1979-03-06 Electron cyclotron resonance plasma generator

Country Status (1)

Country Link
JP (1) JPS5837680B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017016828A (en) * 2015-06-30 2017-01-19 住友理工株式会社 Microwave plasma generation device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3502863A (en) * 1967-08-02 1970-03-24 Hitachi Ltd Electron bombardment type ion source with permanent magnet focusing means therein

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3502863A (en) * 1967-08-02 1970-03-24 Hitachi Ltd Electron bombardment type ion source with permanent magnet focusing means therein

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017016828A (en) * 2015-06-30 2017-01-19 住友理工株式会社 Microwave plasma generation device

Also Published As

Publication number Publication date
JPS5837680B2 (en) 1983-08-17

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