JPS55119399A - Electron cyclotron resonance plasma generator - Google Patents
Electron cyclotron resonance plasma generatorInfo
- Publication number
- JPS55119399A JPS55119399A JP2595979A JP2595979A JPS55119399A JP S55119399 A JPS55119399 A JP S55119399A JP 2595979 A JP2595979 A JP 2595979A JP 2595979 A JP2595979 A JP 2595979A JP S55119399 A JPS55119399 A JP S55119399A
- Authority
- JP
- Japan
- Prior art keywords
- plasma generator
- cyclotron resonance
- electron cyclotron
- resonance plasma
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Plasma Technology (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54025959A JPS5837680B2 (en) | 1979-03-06 | 1979-03-06 | Electron cyclotron resonance plasma generator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54025959A JPS5837680B2 (en) | 1979-03-06 | 1979-03-06 | Electron cyclotron resonance plasma generator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55119399A true JPS55119399A (en) | 1980-09-13 |
JPS5837680B2 JPS5837680B2 (en) | 1983-08-17 |
Family
ID=12180276
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP54025959A Expired JPS5837680B2 (en) | 1979-03-06 | 1979-03-06 | Electron cyclotron resonance plasma generator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5837680B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017016828A (en) * | 2015-06-30 | 2017-01-19 | 住友理工株式会社 | Microwave plasma generation device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3502863A (en) * | 1967-08-02 | 1970-03-24 | Hitachi Ltd | Electron bombardment type ion source with permanent magnet focusing means therein |
-
1979
- 1979-03-06 JP JP54025959A patent/JPS5837680B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3502863A (en) * | 1967-08-02 | 1970-03-24 | Hitachi Ltd | Electron bombardment type ion source with permanent magnet focusing means therein |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017016828A (en) * | 2015-06-30 | 2017-01-19 | 住友理工株式会社 | Microwave plasma generation device |
Also Published As
Publication number | Publication date |
---|---|
JPS5837680B2 (en) | 1983-08-17 |
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