JPS5511818U - - Google Patents
Info
- Publication number
- JPS5511818U JPS5511818U JP9199378U JP9199378U JPS5511818U JP S5511818 U JPS5511818 U JP S5511818U JP 9199378 U JP9199378 U JP 9199378U JP 9199378 U JP9199378 U JP 9199378U JP S5511818 U JPS5511818 U JP S5511818U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9199378U JPS5511818U (OSRAM) | 1978-07-03 | 1978-07-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9199378U JPS5511818U (OSRAM) | 1978-07-03 | 1978-07-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5511818U true JPS5511818U (OSRAM) | 1980-01-25 |
Family
ID=29021766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9199378U Pending JPS5511818U (OSRAM) | 1978-07-03 | 1978-07-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5511818U (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5255070U (OSRAM) * | 1975-10-17 | 1977-04-20 | ||
| JPS61289634A (ja) * | 1985-06-18 | 1986-12-19 | Matsushita Electric Ind Co Ltd | ドライエツチング方法 |
-
1978
- 1978-07-03 JP JP9199378U patent/JPS5511818U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5255070U (OSRAM) * | 1975-10-17 | 1977-04-20 | ||
| JPS61289634A (ja) * | 1985-06-18 | 1986-12-19 | Matsushita Electric Ind Co Ltd | ドライエツチング方法 |