JPS55117840U - - Google Patents
Info
- Publication number
- JPS55117840U JPS55117840U JP1758679U JP1758679U JPS55117840U JP S55117840 U JPS55117840 U JP S55117840U JP 1758679 U JP1758679 U JP 1758679U JP 1758679 U JP1758679 U JP 1758679U JP S55117840 U JPS55117840 U JP S55117840U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1758679U JPS5838603Y2 (ja) | 1979-02-13 | 1979-02-13 | 半導体気相ド−ピング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1758679U JPS5838603Y2 (ja) | 1979-02-13 | 1979-02-13 | 半導体気相ド−ピング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55117840U true JPS55117840U (enExample) | 1980-08-20 |
| JPS5838603Y2 JPS5838603Y2 (ja) | 1983-09-01 |
Family
ID=28843251
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1758679U Expired JPS5838603Y2 (ja) | 1979-02-13 | 1979-02-13 | 半導体気相ド−ピング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5838603Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03106733U (enExample) * | 1990-02-16 | 1991-11-05 |
-
1979
- 1979-02-13 JP JP1758679U patent/JPS5838603Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03106733U (enExample) * | 1990-02-16 | 1991-11-05 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5838603Y2 (ja) | 1983-09-01 |