JPS5511667Y2 - - Google Patents

Info

Publication number
JPS5511667Y2
JPS5511667Y2 JP1975122111U JP12211175U JPS5511667Y2 JP S5511667 Y2 JPS5511667 Y2 JP S5511667Y2 JP 1975122111 U JP1975122111 U JP 1975122111U JP 12211175 U JP12211175 U JP 12211175U JP S5511667 Y2 JPS5511667 Y2 JP S5511667Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1975122111U
Other languages
Japanese (ja)
Other versions
JPS5236181U (it
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975122111U priority Critical patent/JPS5511667Y2/ja
Publication of JPS5236181U publication Critical patent/JPS5236181U/ja
Application granted granted Critical
Publication of JPS5511667Y2 publication Critical patent/JPS5511667Y2/ja
Expired legal-status Critical Current

Links

JP1975122111U 1975-09-03 1975-09-03 Expired JPS5511667Y2 (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975122111U JPS5511667Y2 (it) 1975-09-03 1975-09-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975122111U JPS5511667Y2 (it) 1975-09-03 1975-09-03

Publications (2)

Publication Number Publication Date
JPS5236181U JPS5236181U (it) 1977-03-14
JPS5511667Y2 true JPS5511667Y2 (it) 1980-03-13

Family

ID=28602745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975122111U Expired JPS5511667Y2 (it) 1975-09-03 1975-09-03

Country Status (1)

Country Link
JP (1) JPS5511667Y2 (it)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH063938U (ja) * 1992-06-15 1994-01-18 国際電気株式会社 ウェーハ保持具

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502885U (it) * 1973-05-18 1975-01-13

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH063938U (ja) * 1992-06-15 1994-01-18 国際電気株式会社 ウェーハ保持具

Also Published As

Publication number Publication date
JPS5236181U (it) 1977-03-14

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