JPS5511667Y2 - - Google Patents
Info
- Publication number
- JPS5511667Y2 JPS5511667Y2 JP1975122111U JP12211175U JPS5511667Y2 JP S5511667 Y2 JPS5511667 Y2 JP S5511667Y2 JP 1975122111 U JP1975122111 U JP 1975122111U JP 12211175 U JP12211175 U JP 12211175U JP S5511667 Y2 JPS5511667 Y2 JP S5511667Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975122111U JPS5511667Y2 (it) | 1975-09-03 | 1975-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975122111U JPS5511667Y2 (it) | 1975-09-03 | 1975-09-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5236181U JPS5236181U (it) | 1977-03-14 |
| JPS5511667Y2 true JPS5511667Y2 (it) | 1980-03-13 |
Family
ID=28602745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1975122111U Expired JPS5511667Y2 (it) | 1975-09-03 | 1975-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5511667Y2 (it) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH063938U (ja) * | 1992-06-15 | 1994-01-18 | 国際電気株式会社 | ウェーハ保持具 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS502885U (it) * | 1973-05-18 | 1975-01-13 |
-
1975
- 1975-09-03 JP JP1975122111U patent/JPS5511667Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH063938U (ja) * | 1992-06-15 | 1994-01-18 | 国際電気株式会社 | ウェーハ保持具 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5236181U (it) | 1977-03-14 |