JPS55115047U - - Google Patents

Info

Publication number
JPS55115047U
JPS55115047U JP1420679U JP1420679U JPS55115047U JP S55115047 U JPS55115047 U JP S55115047U JP 1420679 U JP1420679 U JP 1420679U JP 1420679 U JP1420679 U JP 1420679U JP S55115047 U JPS55115047 U JP S55115047U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1420679U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1420679U priority Critical patent/JPS55115047U/ja
Publication of JPS55115047U publication Critical patent/JPS55115047U/ja
Pending legal-status Critical Current

Links

JP1420679U 1979-02-06 1979-02-06 Pending JPS55115047U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1420679U JPS55115047U (en) 1979-02-06 1979-02-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1420679U JPS55115047U (en) 1979-02-06 1979-02-06

Publications (1)

Publication Number Publication Date
JPS55115047U true JPS55115047U (en) 1980-08-13

Family

ID=28833698

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1420679U Pending JPS55115047U (en) 1979-02-06 1979-02-06

Country Status (1)

Country Link
JP (1) JPS55115047U (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58185773A (en) * 1982-04-21 1983-10-29 Toshiba Corp Dry etching method
JPS5929435A (en) * 1982-08-11 1984-02-16 Hitachi Ltd Supporter for sample
JPS60115226A (en) * 1983-11-28 1985-06-21 Hitachi Ltd Substrate temperature control method
JPS6395644A (en) * 1986-10-13 1988-04-26 Nippon Telegr & Teleph Corp <Ntt> Electrostatic chuck
JPH02110926A (en) * 1989-09-27 1990-04-24 Hitachi Ltd Temperature control of specimen and device thereof
JPH02110927A (en) * 1989-09-27 1990-04-24 Hitachi Ltd Specimen holding device
JPH02119131A (en) * 1989-09-27 1990-05-07 Hitachi Ltd Temperature controlling method for sample and its equipment
JPH0373453U (en) * 1989-11-22 1991-07-24

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS512520U (en) * 1974-06-24 1976-01-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS512520U (en) * 1974-06-24 1976-01-09

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58185773A (en) * 1982-04-21 1983-10-29 Toshiba Corp Dry etching method
JPS5929435A (en) * 1982-08-11 1984-02-16 Hitachi Ltd Supporter for sample
JPS60115226A (en) * 1983-11-28 1985-06-21 Hitachi Ltd Substrate temperature control method
JPS6395644A (en) * 1986-10-13 1988-04-26 Nippon Telegr & Teleph Corp <Ntt> Electrostatic chuck
JPH02110926A (en) * 1989-09-27 1990-04-24 Hitachi Ltd Temperature control of specimen and device thereof
JPH02110927A (en) * 1989-09-27 1990-04-24 Hitachi Ltd Specimen holding device
JPH02119131A (en) * 1989-09-27 1990-05-07 Hitachi Ltd Temperature controlling method for sample and its equipment
JPH0373453U (en) * 1989-11-22 1991-07-24

Similar Documents

Publication Publication Date Title
DE2946273C2 (en)
DE2927086C2 (en)
DE3003821C2 (en)
FR2446719B1 (en)
FR2448402B1 (en)
BR8002583A (en)
BR8006808A (en)
FR2448369B3 (en)
FR2447479B3 (en)
FR2445815B1 (en)
JPS55115047U (en)
FR2447714B1 (en)
FR2448044B1 (en)
FR2449110B1 (en)
FR2445763B1 (en)
FR2446851B1 (en)
FR2448159B3 (en)
FR2447052B1 (en)
DE2926029C2 (en)
FR2446187B2 (en)
AT364253B (en)
BR5901094U (en)
AU78390S (en)
AU78385S (en)
AU79557S (en)