JPS5511246B2 - - Google Patents
Info
- Publication number
- JPS5511246B2 JPS5511246B2 JP13695275A JP13695275A JPS5511246B2 JP S5511246 B2 JPS5511246 B2 JP S5511246B2 JP 13695275 A JP13695275 A JP 13695275A JP 13695275 A JP13695275 A JP 13695275A JP S5511246 B2 JPS5511246 B2 JP S5511246B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Physical Vapour Deposition (AREA)
- Inorganic Insulating Materials (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Compositions Of Oxide Ceramics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50136952A JPS5260988A (en) | 1975-11-13 | 1975-11-13 | Manufacturing of dielectric thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50136952A JPS5260988A (en) | 1975-11-13 | 1975-11-13 | Manufacturing of dielectric thin film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5260988A JPS5260988A (en) | 1977-05-19 |
| JPS5511246B2 true JPS5511246B2 (en) | 1980-03-24 |
Family
ID=15187333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50136952A Granted JPS5260988A (en) | 1975-11-13 | 1975-11-13 | Manufacturing of dielectric thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5260988A (en) |
-
1975
- 1975-11-13 JP JP50136952A patent/JPS5260988A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5260988A (en) | 1977-05-19 |