JPS5511245B2 - - Google Patents

Info

Publication number
JPS5511245B2
JPS5511245B2 JP13695175A JP13695175A JPS5511245B2 JP S5511245 B2 JPS5511245 B2 JP S5511245B2 JP 13695175 A JP13695175 A JP 13695175A JP 13695175 A JP13695175 A JP 13695175A JP S5511245 B2 JPS5511245 B2 JP S5511245B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13695175A
Other languages
Japanese (ja)
Other versions
JPS5260987A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50136951A priority Critical patent/JPS5260987A/ja
Publication of JPS5260987A publication Critical patent/JPS5260987A/ja
Publication of JPS5511245B2 publication Critical patent/JPS5511245B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Inorganic Insulating Materials (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP50136951A 1975-11-13 1975-11-13 Manufacturing of dielectric thin film Granted JPS5260987A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50136951A JPS5260987A (en) 1975-11-13 1975-11-13 Manufacturing of dielectric thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50136951A JPS5260987A (en) 1975-11-13 1975-11-13 Manufacturing of dielectric thin film

Publications (2)

Publication Number Publication Date
JPS5260987A JPS5260987A (en) 1977-05-19
JPS5511245B2 true JPS5511245B2 (no) 1980-03-24

Family

ID=15187311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50136951A Granted JPS5260987A (en) 1975-11-13 1975-11-13 Manufacturing of dielectric thin film

Country Status (1)

Country Link
JP (1) JPS5260987A (no)

Also Published As

Publication number Publication date
JPS5260987A (en) 1977-05-19

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