JPS551121A - Wafer holder - Google Patents

Wafer holder

Info

Publication number
JPS551121A
JPS551121A JP7353778A JP7353778A JPS551121A JP S551121 A JPS551121 A JP S551121A JP 7353778 A JP7353778 A JP 7353778A JP 7353778 A JP7353778 A JP 7353778A JP S551121 A JPS551121 A JP S551121A
Authority
JP
Japan
Prior art keywords
wafer
rollers
periphery
fixed position
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7353778A
Other languages
Japanese (ja)
Other versions
JPS593824B2 (en
Inventor
Tsuneo Hiramatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP7353778A priority Critical patent/JPS593824B2/en
Publication of JPS551121A publication Critical patent/JPS551121A/en
Publication of JPS593824B2 publication Critical patent/JPS593824B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To surely hold a wafer of any size in a fixed position by simple construction and operation.
CONSTITUTION: When a wafer 20 is moved up, the periphery of the water is fitted in the grooves of rollers 6A, 6B. Arms 2A, 2B are swung centering shafts 3 by the subsequent elevation of the wafer. After the center of the wafer is moved across an imaginary straight line extending between the axes of rollers 9A, 9B, an external force applied to a plate 15 is gradually decreased to elevate a block 11 by a spring 16. At that time, pins 10A, 10B are pulled up, arms 7A, 7B swing, the rollers 9A, 9B approach each other and the lower part of the periphery of the wafer is fitted in the grooves of the rollers 9A, 9B. When the center of the wafer is elevated to the fixed position, the elevation of the plate 15 is stopped. At that time, the upper part of the periphery of the wafer is engaged with the rollers 6A, 6B. Therefore, the wafer does not tumble but is stably held in the fixed position on a holding plate 1.
COPYRIGHT: (C)1980,JPO&Japio
JP7353778A 1978-06-16 1978-06-16 Wafer holding device Expired JPS593824B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7353778A JPS593824B2 (en) 1978-06-16 1978-06-16 Wafer holding device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7353778A JPS593824B2 (en) 1978-06-16 1978-06-16 Wafer holding device

Publications (2)

Publication Number Publication Date
JPS551121A true JPS551121A (en) 1980-01-07
JPS593824B2 JPS593824B2 (en) 1984-01-26

Family

ID=13521068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7353778A Expired JPS593824B2 (en) 1978-06-16 1978-06-16 Wafer holding device

Country Status (1)

Country Link
JP (1) JPS593824B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59178103A (en) * 1983-03-25 1984-10-09 Sumitomo Metal Ind Ltd Manufacture of checkered steel plate
JPS59224754A (en) * 1983-05-31 1984-12-17 住友金属工業株式会社 Steel material with projection and rolling thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59178103A (en) * 1983-03-25 1984-10-09 Sumitomo Metal Ind Ltd Manufacture of checkered steel plate
JPS59224754A (en) * 1983-05-31 1984-12-17 住友金属工業株式会社 Steel material with projection and rolling thereof
JPS6312992B2 (en) * 1983-05-31 1988-03-23 Sumitomo Metal Ind

Also Published As

Publication number Publication date
JPS593824B2 (en) 1984-01-26

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