JPS551121A - Wafer holder - Google Patents
Wafer holderInfo
- Publication number
- JPS551121A JPS551121A JP7353778A JP7353778A JPS551121A JP S551121 A JPS551121 A JP S551121A JP 7353778 A JP7353778 A JP 7353778A JP 7353778 A JP7353778 A JP 7353778A JP S551121 A JPS551121 A JP S551121A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- rollers
- periphery
- fixed position
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To surely hold a wafer of any size in a fixed position by simple construction and operation.
CONSTITUTION: When a wafer 20 is moved up, the periphery of the water is fitted in the grooves of rollers 6A, 6B. Arms 2A, 2B are swung centering shafts 3 by the subsequent elevation of the wafer. After the center of the wafer is moved across an imaginary straight line extending between the axes of rollers 9A, 9B, an external force applied to a plate 15 is gradually decreased to elevate a block 11 by a spring 16. At that time, pins 10A, 10B are pulled up, arms 7A, 7B swing, the rollers 9A, 9B approach each other and the lower part of the periphery of the wafer is fitted in the grooves of the rollers 9A, 9B. When the center of the wafer is elevated to the fixed position, the elevation of the plate 15 is stopped. At that time, the upper part of the periphery of the wafer is engaged with the rollers 6A, 6B. Therefore, the wafer does not tumble but is stably held in the fixed position on a holding plate 1.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7353778A JPS593824B2 (en) | 1978-06-16 | 1978-06-16 | Wafer holding device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7353778A JPS593824B2 (en) | 1978-06-16 | 1978-06-16 | Wafer holding device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS551121A true JPS551121A (en) | 1980-01-07 |
JPS593824B2 JPS593824B2 (en) | 1984-01-26 |
Family
ID=13521068
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7353778A Expired JPS593824B2 (en) | 1978-06-16 | 1978-06-16 | Wafer holding device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS593824B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59178103A (en) * | 1983-03-25 | 1984-10-09 | Sumitomo Metal Ind Ltd | Manufacture of checkered steel plate |
JPS59224754A (en) * | 1983-05-31 | 1984-12-17 | 住友金属工業株式会社 | Steel material with projection and rolling thereof |
-
1978
- 1978-06-16 JP JP7353778A patent/JPS593824B2/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59178103A (en) * | 1983-03-25 | 1984-10-09 | Sumitomo Metal Ind Ltd | Manufacture of checkered steel plate |
JPS59224754A (en) * | 1983-05-31 | 1984-12-17 | 住友金属工業株式会社 | Steel material with projection and rolling thereof |
JPS6312992B2 (en) * | 1983-05-31 | 1988-03-23 | Sumitomo Metal Ind |
Also Published As
Publication number | Publication date |
---|---|
JPS593824B2 (en) | 1984-01-26 |
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