JPS55112194A - Laser working device - Google Patents

Laser working device

Info

Publication number
JPS55112194A
JPS55112194A JP1979279A JP1979279A JPS55112194A JP S55112194 A JPS55112194 A JP S55112194A JP 1979279 A JP1979279 A JP 1979279A JP 1979279 A JP1979279 A JP 1979279A JP S55112194 A JPS55112194 A JP S55112194A
Authority
JP
Japan
Prior art keywords
film
laser light
laser
evaporating
flying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1979279A
Other languages
Japanese (ja)
Other versions
JPS6261397B2 (en
Inventor
Mikio Hongo
Takeoki Miyauchi
Katsuro Mizukoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1979279A priority Critical patent/JPS55112194A/en
Publication of JPS55112194A publication Critical patent/JPS55112194A/en
Publication of JPS6261397B2 publication Critical patent/JPS6261397B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To achieve the decrease in the transmission efficiency owing to the deposition of the evaporating the flying matter from the work on the laser transmission part by using a continuous laser light-transmittable film in place of transmission plate and exposing always the new portion of the film to laser light during laser working.
CONSTITUTION: Laser light 12 from a laser light oscillator 11 is focused by a condenser lens 13 and pssses through a transmission window 15, laser light tramisttable film 16 and the through-hole 18 of a shield body 17. Next, it is shielded by the shield body 17 and yet it is radiated to the work 19 in a vacuum vessel 14. The radiated portions melt, fly and evaporate, whereby the laser working is accomplished. At this time, a greater portion of the flying and evaporating matter is captured by the shield body 17 but the flying and evaporating matter leaking from the through-hole 18 hits against the film 16 and is captured by the same, whereby it is prevented from reaching the transmission window 15. At the same instant of the radiation starting of the laser light 12, a film take-up mechanism 60 starts taking up, so that the film 16 is being subsequently taken up, thus always fresh film portion is exposed to the advance path of the laser light 12.
COPYRIGHT: (C)1980,JPO&Japio
JP1979279A 1979-02-23 1979-02-23 Laser working device Granted JPS55112194A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979279A JPS55112194A (en) 1979-02-23 1979-02-23 Laser working device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979279A JPS55112194A (en) 1979-02-23 1979-02-23 Laser working device

Publications (2)

Publication Number Publication Date
JPS55112194A true JPS55112194A (en) 1980-08-29
JPS6261397B2 JPS6261397B2 (en) 1987-12-21

Family

ID=12009188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979279A Granted JPS55112194A (en) 1979-02-23 1979-02-23 Laser working device

Country Status (1)

Country Link
JP (1) JPS55112194A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6195794A (en) * 1984-10-18 1986-05-14 Toshiba Corp Laser beam machine
JPH01293582A (en) * 1988-05-21 1989-11-27 Hitachi Ltd Excimer laser device
JPH02290688A (en) * 1989-04-28 1990-11-30 Nissan Motor Co Ltd Apparatus for causing laser beam to irradiate in vacuum
JPH02290687A (en) * 1989-04-28 1990-11-30 Nissan Motor Co Ltd Apparatus for causing laser beam to irradiate in vacuum
JP2003086945A (en) * 2001-09-12 2003-03-20 Hitachi Chem Co Ltd Method for manufacturing multilayer printed wiring board
WO2012077495A1 (en) * 2010-12-09 2012-06-14 株式会社ブイ・テクノロジー Laser annealing device and laser annealing method

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6195794A (en) * 1984-10-18 1986-05-14 Toshiba Corp Laser beam machine
JPH01293582A (en) * 1988-05-21 1989-11-27 Hitachi Ltd Excimer laser device
JPH02290688A (en) * 1989-04-28 1990-11-30 Nissan Motor Co Ltd Apparatus for causing laser beam to irradiate in vacuum
JPH02290687A (en) * 1989-04-28 1990-11-30 Nissan Motor Co Ltd Apparatus for causing laser beam to irradiate in vacuum
JP2003086945A (en) * 2001-09-12 2003-03-20 Hitachi Chem Co Ltd Method for manufacturing multilayer printed wiring board
WO2012077495A1 (en) * 2010-12-09 2012-06-14 株式会社ブイ・テクノロジー Laser annealing device and laser annealing method
JP2012124366A (en) * 2010-12-09 2012-06-28 V Technology Co Ltd Laser annealing device and laser annealing method
CN103262213A (en) * 2010-12-09 2013-08-21 株式会社V技术 Laser annealing device and laser annealing method
KR20140027916A (en) * 2010-12-09 2014-03-07 브이 테크놀로지 씨오. 엘티디 Laser annealing device and laser annealing method
US8999865B2 (en) 2010-12-09 2015-04-07 V Technology Co., Ltd. Laser annealing apparatus and laser annealing method

Also Published As

Publication number Publication date
JPS6261397B2 (en) 1987-12-21

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