JPS55112194A - Laser working device - Google Patents
Laser working deviceInfo
- Publication number
- JPS55112194A JPS55112194A JP1979279A JP1979279A JPS55112194A JP S55112194 A JPS55112194 A JP S55112194A JP 1979279 A JP1979279 A JP 1979279A JP 1979279 A JP1979279 A JP 1979279A JP S55112194 A JPS55112194 A JP S55112194A
- Authority
- JP
- Japan
- Prior art keywords
- film
- laser light
- laser
- evaporating
- flying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To achieve the decrease in the transmission efficiency owing to the deposition of the evaporating the flying matter from the work on the laser transmission part by using a continuous laser light-transmittable film in place of transmission plate and exposing always the new portion of the film to laser light during laser working.
CONSTITUTION: Laser light 12 from a laser light oscillator 11 is focused by a condenser lens 13 and pssses through a transmission window 15, laser light tramisttable film 16 and the through-hole 18 of a shield body 17. Next, it is shielded by the shield body 17 and yet it is radiated to the work 19 in a vacuum vessel 14. The radiated portions melt, fly and evaporate, whereby the laser working is accomplished. At this time, a greater portion of the flying and evaporating matter is captured by the shield body 17 but the flying and evaporating matter leaking from the through-hole 18 hits against the film 16 and is captured by the same, whereby it is prevented from reaching the transmission window 15. At the same instant of the radiation starting of the laser light 12, a film take-up mechanism 60 starts taking up, so that the film 16 is being subsequently taken up, thus always fresh film portion is exposed to the advance path of the laser light 12.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1979279A JPS55112194A (en) | 1979-02-23 | 1979-02-23 | Laser working device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1979279A JPS55112194A (en) | 1979-02-23 | 1979-02-23 | Laser working device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55112194A true JPS55112194A (en) | 1980-08-29 |
JPS6261397B2 JPS6261397B2 (en) | 1987-12-21 |
Family
ID=12009188
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1979279A Granted JPS55112194A (en) | 1979-02-23 | 1979-02-23 | Laser working device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55112194A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6195794A (en) * | 1984-10-18 | 1986-05-14 | Toshiba Corp | Laser beam machine |
JPH01293582A (en) * | 1988-05-21 | 1989-11-27 | Hitachi Ltd | Excimer laser device |
JPH02290688A (en) * | 1989-04-28 | 1990-11-30 | Nissan Motor Co Ltd | Apparatus for causing laser beam to irradiate in vacuum |
JPH02290687A (en) * | 1989-04-28 | 1990-11-30 | Nissan Motor Co Ltd | Apparatus for causing laser beam to irradiate in vacuum |
JP2003086945A (en) * | 2001-09-12 | 2003-03-20 | Hitachi Chem Co Ltd | Method for manufacturing multilayer printed wiring board |
WO2012077495A1 (en) * | 2010-12-09 | 2012-06-14 | 株式会社ブイ・テクノロジー | Laser annealing device and laser annealing method |
-
1979
- 1979-02-23 JP JP1979279A patent/JPS55112194A/en active Granted
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6195794A (en) * | 1984-10-18 | 1986-05-14 | Toshiba Corp | Laser beam machine |
JPH01293582A (en) * | 1988-05-21 | 1989-11-27 | Hitachi Ltd | Excimer laser device |
JPH02290688A (en) * | 1989-04-28 | 1990-11-30 | Nissan Motor Co Ltd | Apparatus for causing laser beam to irradiate in vacuum |
JPH02290687A (en) * | 1989-04-28 | 1990-11-30 | Nissan Motor Co Ltd | Apparatus for causing laser beam to irradiate in vacuum |
JP2003086945A (en) * | 2001-09-12 | 2003-03-20 | Hitachi Chem Co Ltd | Method for manufacturing multilayer printed wiring board |
WO2012077495A1 (en) * | 2010-12-09 | 2012-06-14 | 株式会社ブイ・テクノロジー | Laser annealing device and laser annealing method |
JP2012124366A (en) * | 2010-12-09 | 2012-06-28 | V Technology Co Ltd | Laser annealing device and laser annealing method |
CN103262213A (en) * | 2010-12-09 | 2013-08-21 | 株式会社V技术 | Laser annealing device and laser annealing method |
KR20140027916A (en) * | 2010-12-09 | 2014-03-07 | 브이 테크놀로지 씨오. 엘티디 | Laser annealing device and laser annealing method |
US8999865B2 (en) | 2010-12-09 | 2015-04-07 | V Technology Co., Ltd. | Laser annealing apparatus and laser annealing method |
Also Published As
Publication number | Publication date |
---|---|
JPS6261397B2 (en) | 1987-12-21 |
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