JPS551120A - Driver for wafer holder - Google Patents
Driver for wafer holderInfo
- Publication number
- JPS551120A JPS551120A JP7353678A JP7353678A JPS551120A JP S551120 A JPS551120 A JP S551120A JP 7353678 A JP7353678 A JP 7353678A JP 7353678 A JP7353678 A JP 7353678A JP S551120 A JPS551120 A JP S551120A
- Authority
- JP
- Japan
- Prior art keywords
- holder
- holding side
- plate
- groove
- parallel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To eliminate the limitation on the decending distance of a wafer holder and prevent the application of inappropriate force to the holder, by applying a driving force to the holder in the direction of a holding side of a driver.
CONSTITUTION: When a connection shaft 32 is driven rightward, rollers 46, 48 are guided in grooves 37, 38 and a plate 40 is moved. At that time, rollers 47, 49 are guided in a groove 39 through links 42, 43 and a plate 41 is translated in the direction of the groove 39. Because the groove 39 is parallel with the holding side, a heat plate 15 and guide shafts 14A, 14B are pushed down in parallel with the holding side by a metal member 51. Therefore, no inappropriate force is applied to the guide shafts 14A, 14B and the push-down distance is not limited. When the connection shaft 32 is driven leftward, the metal member 51 is moved up and the head plate 15 is returned to the original position by a spring 16. The driving force for holding a wafer can thus be applied to the wafer holder in parallel with the holding side.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7353678A JPS593823B2 (en) | 1978-06-16 | 1978-06-16 | Drive device for wafer holding device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7353678A JPS593823B2 (en) | 1978-06-16 | 1978-06-16 | Drive device for wafer holding device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS551120A true JPS551120A (en) | 1980-01-07 |
JPS593823B2 JPS593823B2 (en) | 1984-01-26 |
Family
ID=13521040
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7353678A Expired JPS593823B2 (en) | 1978-06-16 | 1978-06-16 | Drive device for wafer holding device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS593823B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58120653U (en) * | 1982-02-10 | 1983-08-17 | 日本真空技術株式会社 | wafer grip equipment |
JPS58164237U (en) * | 1982-04-27 | 1983-11-01 | 日本真空技術株式会社 | wafer grip equipment |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61150783U (en) * | 1985-03-12 | 1986-09-18 |
-
1978
- 1978-06-16 JP JP7353678A patent/JPS593823B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58120653U (en) * | 1982-02-10 | 1983-08-17 | 日本真空技術株式会社 | wafer grip equipment |
JPS58164237U (en) * | 1982-04-27 | 1983-11-01 | 日本真空技術株式会社 | wafer grip equipment |
Also Published As
Publication number | Publication date |
---|---|
JPS593823B2 (en) | 1984-01-26 |
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