JPS55108655A - Resin composition for resist - Google Patents
Resin composition for resistInfo
- Publication number
- JPS55108655A JPS55108655A JP1591679A JP1591679A JPS55108655A JP S55108655 A JPS55108655 A JP S55108655A JP 1591679 A JP1591679 A JP 1591679A JP 1591679 A JP1591679 A JP 1591679A JP S55108655 A JPS55108655 A JP S55108655A
- Authority
- JP
- Japan
- Prior art keywords
- formula
- acid
- methacrylic
- average
- resin composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Epoxy Resins (AREA)
Abstract
PURPOSE: To obtain a resin composition having sufficient resolving power and high sensitivity by blending a specified methacrylic polymer and an aliphatic dicarboxylic acid.
CONSTITUTION: An aliphatic dicarboxylic acid such as methacrylic acid dimer or 1,2-ethanedicarboxylic acid represented by formula IV or V (where n is 1W12) is blended into a methacrylic copolymer containing methyl methacrylate and methacrylic acid ester, in a molar ratio of about 1:0.05W0.2, having an epoxy group at its side chain and represented by formula I (where n is 1W4), formula II (where n is 2W4) or formula III (where n is 1W4). The blending ratio of the acid to the ester in the copolymer is about 0.4W0.6 by mol. The copolymer preferably has a no. average MW (Mn) of about 4000W100000 and a wt. average MW to no. average MW ratio (Mw/Mn) of about 3 or less.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1591679A JPS55108655A (en) | 1979-02-14 | 1979-02-14 | Resin composition for resist |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1591679A JPS55108655A (en) | 1979-02-14 | 1979-02-14 | Resin composition for resist |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55108655A true JPS55108655A (en) | 1980-08-21 |
Family
ID=11902093
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1591679A Pending JPS55108655A (en) | 1979-02-14 | 1979-02-14 | Resin composition for resist |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55108655A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003251808A (en) * | 2001-12-28 | 2003-09-09 | Canon Inc | Channel constituting member of inkjet recording head and manufacturing method for inkjet recording head |
-
1979
- 1979-02-14 JP JP1591679A patent/JPS55108655A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003251808A (en) * | 2001-12-28 | 2003-09-09 | Canon Inc | Channel constituting member of inkjet recording head and manufacturing method for inkjet recording head |
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