JPS55105999A - Neutral particle incident device - Google Patents

Neutral particle incident device

Info

Publication number
JPS55105999A
JPS55105999A JP1322079A JP1322079A JPS55105999A JP S55105999 A JPS55105999 A JP S55105999A JP 1322079 A JP1322079 A JP 1322079A JP 1322079 A JP1322079 A JP 1322079A JP S55105999 A JPS55105999 A JP S55105999A
Authority
JP
Japan
Prior art keywords
neutral particle
incident device
particle incident
neutral
particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1322079A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6111440B2 (enrdf_load_stackoverflow
Inventor
Shiyouji Isobe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1322079A priority Critical patent/JPS55105999A/ja
Publication of JPS55105999A publication Critical patent/JPS55105999A/ja
Publication of JPS6111440B2 publication Critical patent/JPS6111440B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Plasma Technology (AREA)
JP1322079A 1979-02-09 1979-02-09 Neutral particle incident device Granted JPS55105999A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1322079A JPS55105999A (en) 1979-02-09 1979-02-09 Neutral particle incident device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1322079A JPS55105999A (en) 1979-02-09 1979-02-09 Neutral particle incident device

Publications (2)

Publication Number Publication Date
JPS55105999A true JPS55105999A (en) 1980-08-14
JPS6111440B2 JPS6111440B2 (enrdf_load_stackoverflow) 1986-04-02

Family

ID=11827081

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1322079A Granted JPS55105999A (en) 1979-02-09 1979-02-09 Neutral particle incident device

Country Status (1)

Country Link
JP (1) JPS55105999A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014159809A (ja) * 2013-01-25 2014-09-04 Shinku Jikkenshitsu:Kk ゲッター部材収納具、ゲッター装置及びゲッターポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014159809A (ja) * 2013-01-25 2014-09-04 Shinku Jikkenshitsu:Kk ゲッター部材収納具、ゲッター装置及びゲッターポンプ

Also Published As

Publication number Publication date
JPS6111440B2 (enrdf_load_stackoverflow) 1986-04-02

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