JPS55102915A - Tuning-fork type piezoelectric vibrator - Google Patents

Tuning-fork type piezoelectric vibrator

Info

Publication number
JPS55102915A
JPS55102915A JP985379A JP985379A JPS55102915A JP S55102915 A JPS55102915 A JP S55102915A JP 985379 A JP985379 A JP 985379A JP 985379 A JP985379 A JP 985379A JP S55102915 A JPS55102915 A JP S55102915A
Authority
JP
Japan
Prior art keywords
electrode
vibrator
tuning
piezoelectric vibrator
type piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP985379A
Other languages
Japanese (ja)
Inventor
Hideo Tabata
Hironori Shimazu
Akihito Kudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP985379A priority Critical patent/JPS55102915A/en
Publication of JPS55102915A publication Critical patent/JPS55102915A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To obtain a vibrator with miniature and highly reliable electrodes by constituting an electrode in the center of a main surface by dividing the electrode by photoetching, and then by forming an electrode, attached to the flank, of a thin film by selective masking. CONSTITUTION:Vibrator 1 has electrodes 2 and 3 arranged and electrode 2 arranged in the center of the main surface of the vibrator is formed by photoetching. Further, electrode 3 attached to its flank is arranged covering the main surface side part and flank. Namely, electrode 2 is constituted by electrode-dividing by photoetching and electrode 3 is formed of a thin film by selective masking. Consequently, a vibrator can be obtained which has miniature and highly-reliable electrodes.
JP985379A 1979-01-30 1979-01-30 Tuning-fork type piezoelectric vibrator Pending JPS55102915A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP985379A JPS55102915A (en) 1979-01-30 1979-01-30 Tuning-fork type piezoelectric vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP985379A JPS55102915A (en) 1979-01-30 1979-01-30 Tuning-fork type piezoelectric vibrator

Publications (1)

Publication Number Publication Date
JPS55102915A true JPS55102915A (en) 1980-08-06

Family

ID=11731683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP985379A Pending JPS55102915A (en) 1979-01-30 1979-01-30 Tuning-fork type piezoelectric vibrator

Country Status (1)

Country Link
JP (1) JPS55102915A (en)

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