JPS55101903A - Variable curvature mirror - Google Patents

Variable curvature mirror

Info

Publication number
JPS55101903A
JPS55101903A JP1006479A JP1006479A JPS55101903A JP S55101903 A JPS55101903 A JP S55101903A JP 1006479 A JP1006479 A JP 1006479A JP 1006479 A JP1006479 A JP 1006479A JP S55101903 A JPS55101903 A JP S55101903A
Authority
JP
Japan
Prior art keywords
layer
film
mirror
electrodes
sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1006479A
Other languages
English (en)
Inventor
Hirokuni Sato
Osamu Ikeda
Taikan Ishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kureha Corp
Original Assignee
Kureha Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kureha Corp filed Critical Kureha Corp
Priority to JP1006479A priority Critical patent/JPS55101903A/ja
Publication of JPS55101903A publication Critical patent/JPS55101903A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Optical Elements Other Than Lenses (AREA)
JP1006479A 1979-01-31 1979-01-31 Variable curvature mirror Pending JPS55101903A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1006479A JPS55101903A (en) 1979-01-31 1979-01-31 Variable curvature mirror

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1006479A JPS55101903A (en) 1979-01-31 1979-01-31 Variable curvature mirror

Publications (1)

Publication Number Publication Date
JPS55101903A true JPS55101903A (en) 1980-08-04

Family

ID=11739940

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1006479A Pending JPS55101903A (en) 1979-01-31 1979-01-31 Variable curvature mirror

Country Status (1)

Country Link
JP (1) JPS55101903A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004011026A1 (de) * 2004-03-04 2005-09-29 Siemens Ag Adaptives optisches Element mit einem Polymeraktor
JP2016057529A (ja) * 2014-09-11 2016-04-21 株式会社デンソー ３次元形状作成装置
JP2016533516A (ja) * 2013-09-27 2016-10-27 カール・ツァイス・エスエムティー・ゲーエムベーハー ミラー、特にマイクロリソグラフィー投影露光装置用ミラー
JP2018014818A (ja) * 2016-07-20 2018-01-25 株式会社デンソー 光走査装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004011026A1 (de) * 2004-03-04 2005-09-29 Siemens Ag Adaptives optisches Element mit einem Polymeraktor
JP2016533516A (ja) * 2013-09-27 2016-10-27 カール・ツァイス・エスエムティー・ゲーエムベーハー ミラー、特にマイクロリソグラフィー投影露光装置用ミラー
JP2016057529A (ja) * 2014-09-11 2016-04-21 株式会社デンソー ３次元形状作成装置
JP2018014818A (ja) * 2016-07-20 2018-01-25 株式会社デンソー 光走査装置

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