JPS5498298A - Gas sensitive element - Google Patents

Gas sensitive element

Info

Publication number
JPS5498298A
JPS5498298A JP496078A JP496078A JPS5498298A JP S5498298 A JPS5498298 A JP S5498298A JP 496078 A JP496078 A JP 496078A JP 496078 A JP496078 A JP 496078A JP S5498298 A JPS5498298 A JP S5498298A
Authority
JP
Japan
Prior art keywords
sensitivity
metal oxide
oxide semiconductor
catalyst layer
stable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP496078A
Other languages
Japanese (ja)
Other versions
JPS6133128B2 (en
Inventor
Hideo Okuma
Takashi Takahashi
Masaki Katsura
Tadao Kaneda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP496078A priority Critical patent/JPS5498298A/en
Publication of JPS5498298A publication Critical patent/JPS5498298A/en
Publication of JPS6133128B2 publication Critical patent/JPS6133128B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE: To improve sensitivity and gas selectivity, provide sensitivity which is stable for a long period of time and achieve longer life by disposing a metal oxide semiconductor and a catalyst layer in proximity thereto and interposing a porous diaphragm between both.
CONSTITUTION: A pair of semicircular electrodes 3a, 3b are provided on the outside peripheral surface of a cylindrical insulation substrate 1 which is put on with a coil form heater 2 in the inside and is composed of, e.g., Al2O3. A metal oxide semiconductor 4 composed of ZnO-Ga2O3-Sb2O3 is formed on the substrate 1 surface including said electrodes. Further, a catalyst layer 6 composed of mullite carrier containing platinum is provided on the surface of said semiconductor 4 via porous diaphragm 5 composed of mullite. Thereby, the higher characteristics and longer life of the metal oxide semiconductor layer and catalyst layer may be achieved and the superior sensitivity which is stable for a long period of time and gas sensitivity may be provided.
COPYRIGHT: (C)1979,JPO&Japio
JP496078A 1978-01-20 1978-01-20 Gas sensitive element Granted JPS5498298A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP496078A JPS5498298A (en) 1978-01-20 1978-01-20 Gas sensitive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP496078A JPS5498298A (en) 1978-01-20 1978-01-20 Gas sensitive element

Publications (2)

Publication Number Publication Date
JPS5498298A true JPS5498298A (en) 1979-08-03
JPS6133128B2 JPS6133128B2 (en) 1986-07-31

Family

ID=11598140

Family Applications (1)

Application Number Title Priority Date Filing Date
JP496078A Granted JPS5498298A (en) 1978-01-20 1978-01-20 Gas sensitive element

Country Status (1)

Country Link
JP (1) JPS5498298A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61202065U (en) * 1985-06-10 1986-12-18
US4908119A (en) * 1986-09-01 1990-03-13 Nippondenso Co., Ltd. Apparatus for determining oxygen concentration

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61202065U (en) * 1985-06-10 1986-12-18
US4908119A (en) * 1986-09-01 1990-03-13 Nippondenso Co., Ltd. Apparatus for determining oxygen concentration

Also Published As

Publication number Publication date
JPS6133128B2 (en) 1986-07-31

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