JPS5497357A - Detector for sample irradiation current of electron microscope or the like - Google Patents

Detector for sample irradiation current of electron microscope or the like

Info

Publication number
JPS5497357A
JPS5497357A JP404078A JP404078A JPS5497357A JP S5497357 A JPS5497357 A JP S5497357A JP 404078 A JP404078 A JP 404078A JP 404078 A JP404078 A JP 404078A JP S5497357 A JPS5497357 A JP S5497357A
Authority
JP
Japan
Prior art keywords
sample
adsorptive
electron beam
current
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP404078A
Other languages
Japanese (ja)
Other versions
JPS5826773B2 (en
Inventor
Katsuyoshi Ueno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP53004040A priority Critical patent/JPS5826773B2/en
Publication of JPS5497357A publication Critical patent/JPS5497357A/en
Publication of JPS5826773B2 publication Critical patent/JPS5826773B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a sample current monitor which can simplify observation and analysis after measurements, by measuring a sample current at any time by detecting the current of an electron beam by making an adsorptive adsorb the electron beam with which an electron tube is irradiated.
CONSTITUTION: Electron beam 2 emitted from the electron gun is focused thinly by the condenser lens system and caused to strike sample 1 to generate X rays X from sample 1 and the X rays X are analysed by non-variance type analyser 3. Adsorptive 4 of a conductive substance is arranged covering sample 1 in this constitution and cooled in a cooling tank to adsorb gas moleculars near sample 1, this adsorptive 4 is fixed while being isolated electrically and thermally from a mirror body such as an object lens, and ammeter 5 is connected to adsorptive 4 and then grounded. By supplying a current to deflecting coil 6, electron beam 2 is deflected and made to strike adsorptive 4, so that ammeter 5 will detect the current value of sample irradiation electron beam 2.
COPYRIGHT: (C)1979,JPO&Japio
JP53004040A 1978-01-18 1978-01-18 Sample irradiation current detection device for electron microscopes, etc. Expired JPS5826773B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53004040A JPS5826773B2 (en) 1978-01-18 1978-01-18 Sample irradiation current detection device for electron microscopes, etc.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53004040A JPS5826773B2 (en) 1978-01-18 1978-01-18 Sample irradiation current detection device for electron microscopes, etc.

Publications (2)

Publication Number Publication Date
JPS5497357A true JPS5497357A (en) 1979-08-01
JPS5826773B2 JPS5826773B2 (en) 1983-06-04

Family

ID=11573827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53004040A Expired JPS5826773B2 (en) 1978-01-18 1978-01-18 Sample irradiation current detection device for electron microscopes, etc.

Country Status (1)

Country Link
JP (1) JPS5826773B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6224545A (en) * 1985-07-24 1987-02-02 Hitachi Ltd Charged particle optical system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4960651U (en) * 1972-09-06 1974-05-28
JPS5141545A (en) * 1974-08-07 1976-04-07 Rank Organisation Ltd

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4960651U (en) * 1972-09-06 1974-05-28
JPS5141545A (en) * 1974-08-07 1976-04-07 Rank Organisation Ltd

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6224545A (en) * 1985-07-24 1987-02-02 Hitachi Ltd Charged particle optical system

Also Published As

Publication number Publication date
JPS5826773B2 (en) 1983-06-04

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