JPS5497357A - Detector for sample irradiation current of electron microscope or the like - Google Patents
Detector for sample irradiation current of electron microscope or the likeInfo
- Publication number
- JPS5497357A JPS5497357A JP404078A JP404078A JPS5497357A JP S5497357 A JPS5497357 A JP S5497357A JP 404078 A JP404078 A JP 404078A JP 404078 A JP404078 A JP 404078A JP S5497357 A JPS5497357 A JP S5497357A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- adsorptive
- electron beam
- current
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To obtain a sample current monitor which can simplify observation and analysis after measurements, by measuring a sample current at any time by detecting the current of an electron beam by making an adsorptive adsorb the electron beam with which an electron tube is irradiated.
CONSTITUTION: Electron beam 2 emitted from the electron gun is focused thinly by the condenser lens system and caused to strike sample 1 to generate X rays X from sample 1 and the X rays X are analysed by non-variance type analyser 3. Adsorptive 4 of a conductive substance is arranged covering sample 1 in this constitution and cooled in a cooling tank to adsorb gas moleculars near sample 1, this adsorptive 4 is fixed while being isolated electrically and thermally from a mirror body such as an object lens, and ammeter 5 is connected to adsorptive 4 and then grounded. By supplying a current to deflecting coil 6, electron beam 2 is deflected and made to strike adsorptive 4, so that ammeter 5 will detect the current value of sample irradiation electron beam 2.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53004040A JPS5826773B2 (en) | 1978-01-18 | 1978-01-18 | Sample irradiation current detection device for electron microscopes, etc. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53004040A JPS5826773B2 (en) | 1978-01-18 | 1978-01-18 | Sample irradiation current detection device for electron microscopes, etc. |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5497357A true JPS5497357A (en) | 1979-08-01 |
JPS5826773B2 JPS5826773B2 (en) | 1983-06-04 |
Family
ID=11573827
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53004040A Expired JPS5826773B2 (en) | 1978-01-18 | 1978-01-18 | Sample irradiation current detection device for electron microscopes, etc. |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5826773B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6224545A (en) * | 1985-07-24 | 1987-02-02 | Hitachi Ltd | Charged particle optical system |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4960651U (en) * | 1972-09-06 | 1974-05-28 | ||
JPS5141545A (en) * | 1974-08-07 | 1976-04-07 | Rank Organisation Ltd |
-
1978
- 1978-01-18 JP JP53004040A patent/JPS5826773B2/en not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4960651U (en) * | 1972-09-06 | 1974-05-28 | ||
JPS5141545A (en) * | 1974-08-07 | 1976-04-07 | Rank Organisation Ltd |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6224545A (en) * | 1985-07-24 | 1987-02-02 | Hitachi Ltd | Charged particle optical system |
Also Published As
Publication number | Publication date |
---|---|
JPS5826773B2 (en) | 1983-06-04 |
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