JPS549471B2 - - Google Patents

Info

Publication number
JPS549471B2
JPS549471B2 JP6831571A JP6831571A JPS549471B2 JP S549471 B2 JPS549471 B2 JP S549471B2 JP 6831571 A JP6831571 A JP 6831571A JP 6831571 A JP6831571 A JP 6831571A JP S549471 B2 JPS549471 B2 JP S549471B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6831571A
Other languages
Japanese (ja)
Other versions
JPS4834482A (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6831571A priority Critical patent/JPS549471B2/ja
Publication of JPS4834482A publication Critical patent/JPS4834482A/ja
Publication of JPS549471B2 publication Critical patent/JPS549471B2/ja
Expired legal-status Critical Current

Links

JP6831571A 1971-09-04 1971-09-04 Expired JPS549471B2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6831571A JPS549471B2 (cg-RX-API-DMAC10.html) 1971-09-04 1971-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6831571A JPS549471B2 (cg-RX-API-DMAC10.html) 1971-09-04 1971-09-04

Publications (2)

Publication Number Publication Date
JPS4834482A JPS4834482A (cg-RX-API-DMAC10.html) 1973-05-18
JPS549471B2 true JPS549471B2 (cg-RX-API-DMAC10.html) 1979-04-24

Family

ID=13370247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6831571A Expired JPS549471B2 (cg-RX-API-DMAC10.html) 1971-09-04 1971-09-04

Country Status (1)

Country Link
JP (1) JPS549471B2 (cg-RX-API-DMAC10.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51157512U (cg-RX-API-DMAC10.html) * 1975-06-10 1976-12-15
JPS5279861U (cg-RX-API-DMAC10.html) * 1975-12-11 1977-06-14
JPS5552673Y2 (cg-RX-API-DMAC10.html) * 1975-12-20 1980-12-06
JPS5492534A (en) * 1977-12-28 1979-07-21 Fujitsu Ltd Plasma treating device
JPS5681951A (en) * 1980-11-10 1981-07-04 Toshiba Corp Holder of semiconductor substrate

Also Published As

Publication number Publication date
JPS4834482A (cg-RX-API-DMAC10.html) 1973-05-18

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