JPS549337Y2 - - Google Patents
Info
- Publication number
- JPS549337Y2 JPS549337Y2 JP1973137555U JP13755573U JPS549337Y2 JP S549337 Y2 JPS549337 Y2 JP S549337Y2 JP 1973137555 U JP1973137555 U JP 1973137555U JP 13755573 U JP13755573 U JP 13755573U JP S549337 Y2 JPS549337 Y2 JP S549337Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1973137555U JPS549337Y2 (en) | 1973-11-30 | 1973-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1973137555U JPS549337Y2 (en) | 1973-11-30 | 1973-11-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5080974U JPS5080974U (en) | 1975-07-12 |
| JPS549337Y2 true JPS549337Y2 (en) | 1979-05-01 |
Family
ID=28409985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1973137555U Expired JPS549337Y2 (en) | 1973-11-30 | 1973-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS549337Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2549882B2 (en) * | 1988-01-27 | 1996-10-30 | 東京エレクトロン株式会社 | Inspection equipment |
-
1973
- 1973-11-30 JP JP1973137555U patent/JPS549337Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5080974U (en) | 1975-07-12 |