JPS549178B2 - - Google Patents
Info
- Publication number
- JPS549178B2 JPS549178B2 JP5592173A JP5592173A JPS549178B2 JP S549178 B2 JPS549178 B2 JP S549178B2 JP 5592173 A JP5592173 A JP 5592173A JP 5592173 A JP5592173 A JP 5592173A JP S549178 B2 JPS549178 B2 JP S549178B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Compositions Of Macromolecular Compounds (AREA)
- Treatments For Attaching Organic Compounds To Fibrous Goods (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5592173A JPS549178B2 (https=) | 1973-05-19 | 1973-05-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5592173A JPS549178B2 (https=) | 1973-05-19 | 1973-05-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS504023A JPS504023A (https=) | 1975-01-16 |
| JPS549178B2 true JPS549178B2 (https=) | 1979-04-21 |
Family
ID=13012559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5592173A Expired JPS549178B2 (https=) | 1973-05-19 | 1973-05-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS549178B2 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5261077B2 (ja) | 2008-08-29 | 2013-08-14 | 大日本スクリーン製造株式会社 | 基板洗浄方法および基板洗浄装置 |
| JP2013089797A (ja) | 2011-10-19 | 2013-05-13 | Ebara Corp | 基板洗浄方法及び基板洗浄装置 |
| JP6093569B2 (ja) | 2012-12-28 | 2017-03-08 | 株式会社荏原製作所 | 基板洗浄装置 |
-
1973
- 1973-05-19 JP JP5592173A patent/JPS549178B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS504023A (https=) | 1975-01-16 |