JPS504023A - - Google Patents
Info
- Publication number
- JPS504023A JPS504023A JP5592173A JP5592173A JPS504023A JP S504023 A JPS504023 A JP S504023A JP 5592173 A JP5592173 A JP 5592173A JP 5592173 A JP5592173 A JP 5592173A JP S504023 A JPS504023 A JP S504023A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compositions Of Macromolecular Compounds (AREA)
- Treatments For Attaching Organic Compounds To Fibrous Goods (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5592173A JPS549178B2 (https=) | 1973-05-19 | 1973-05-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5592173A JPS549178B2 (https=) | 1973-05-19 | 1973-05-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS504023A true JPS504023A (https=) | 1975-01-16 |
| JPS549178B2 JPS549178B2 (https=) | 1979-04-21 |
Family
ID=13012559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5592173A Expired JPS549178B2 (https=) | 1973-05-19 | 1973-05-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS549178B2 (https=) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20130043071A (ko) | 2011-10-19 | 2013-04-29 | 가부시키가이샤 에바라 세이사꾸쇼 | 기판 세정 방법 및 기판 세정 장치 |
| KR20140086840A (ko) | 2012-12-28 | 2014-07-08 | 가부시키가이샤 에바라 세이사꾸쇼 | 기판 세정 장치 |
| US10699894B2 (en) | 2008-08-29 | 2020-06-30 | SCREEN Holdings Co., Ltd. | Substrate cleaning method and substrate cleaning apparatus |
-
1973
- 1973-05-19 JP JP5592173A patent/JPS549178B2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10699894B2 (en) | 2008-08-29 | 2020-06-30 | SCREEN Holdings Co., Ltd. | Substrate cleaning method and substrate cleaning apparatus |
| US10854443B2 (en) | 2008-08-29 | 2020-12-01 | SCREEN Holdings Co., Ltd. | Substrate cleaning method and substrate cleaning apparatus |
| KR20130043071A (ko) | 2011-10-19 | 2013-04-29 | 가부시키가이샤 에바라 세이사꾸쇼 | 기판 세정 방법 및 기판 세정 장치 |
| KR20140086840A (ko) | 2012-12-28 | 2014-07-08 | 가부시키가이샤 에바라 세이사꾸쇼 | 기판 세정 장치 |
| US10737301B2 (en) | 2012-12-28 | 2020-08-11 | Ebara Corporation | Substrate cleaning apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS549178B2 (https=) | 1979-04-21 |