JPS5488913A - Deoxidation of impurity contained in silicon nitride based material - Google Patents

Deoxidation of impurity contained in silicon nitride based material

Info

Publication number
JPS5488913A
JPS5488913A JP15638977A JP15638977A JPS5488913A JP S5488913 A JPS5488913 A JP S5488913A JP 15638977 A JP15638977 A JP 15638977A JP 15638977 A JP15638977 A JP 15638977A JP S5488913 A JPS5488913 A JP S5488913A
Authority
JP
Japan
Prior art keywords
deoxidation
silicon nitride
based material
nitride based
impurity contained
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15638977A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6236965B2 (enrdf_load_stackoverflow
Inventor
Michiyasu Komatsu
Katsutoshi Nishida
Tadashi Miyano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP15638977A priority Critical patent/JPS5488913A/ja
Publication of JPS5488913A publication Critical patent/JPS5488913A/ja
Publication of JPS6236965B2 publication Critical patent/JPS6236965B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP15638977A 1977-12-27 1977-12-27 Deoxidation of impurity contained in silicon nitride based material Granted JPS5488913A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15638977A JPS5488913A (en) 1977-12-27 1977-12-27 Deoxidation of impurity contained in silicon nitride based material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15638977A JPS5488913A (en) 1977-12-27 1977-12-27 Deoxidation of impurity contained in silicon nitride based material

Publications (2)

Publication Number Publication Date
JPS5488913A true JPS5488913A (en) 1979-07-14
JPS6236965B2 JPS6236965B2 (enrdf_load_stackoverflow) 1987-08-10

Family

ID=15626666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15638977A Granted JPS5488913A (en) 1977-12-27 1977-12-27 Deoxidation of impurity contained in silicon nitride based material

Country Status (1)

Country Link
JP (1) JPS5488913A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01226768A (ja) * 1988-03-07 1989-09-11 Toshiba Ceramics Co Ltd 窒化ケイ素焼結体の製造方法
JP2018070436A (ja) * 2016-11-04 2018-05-10 株式会社Maruwa 窒化ケイ素焼結体の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01226768A (ja) * 1988-03-07 1989-09-11 Toshiba Ceramics Co Ltd 窒化ケイ素焼結体の製造方法
JP2018070436A (ja) * 2016-11-04 2018-05-10 株式会社Maruwa 窒化ケイ素焼結体の製造方法

Also Published As

Publication number Publication date
JPS6236965B2 (enrdf_load_stackoverflow) 1987-08-10

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