JPS5488060A - Exhausting method of electronic tube - Google Patents

Exhausting method of electronic tube

Info

Publication number
JPS5488060A
JPS5488060A JP15555577A JP15555577A JPS5488060A JP S5488060 A JPS5488060 A JP S5488060A JP 15555577 A JP15555577 A JP 15555577A JP 15555577 A JP15555577 A JP 15555577A JP S5488060 A JPS5488060 A JP S5488060A
Authority
JP
Japan
Prior art keywords
electrode
magnetron
exhausting
ultrasonic wave
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15555577A
Other languages
Japanese (ja)
Inventor
Yoshio Ishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15555577A priority Critical patent/JPS5488060A/en
Publication of JPS5488060A publication Critical patent/JPS5488060A/en
Pending legal-status Critical Current

Links

Landscapes

  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)

Abstract

PURPOSE: To obtain a high vacuum degree while shortening an exhausting time considerably by giving ultrasonic wave to a bulb to promote the gas emission from the inside wall and the electrode when vacuum exhausting is performed under the state where the electrode is stored in an electronic tube.
CONSTITUTION: Oil diffusion vacuum pump 7 and oil rotation vacuum pump 8 are operated to perform vacuum exhausting in magnetron 6, and ultarsonic wave oscillator 15 is caused to oscillate ultrasonic wave. Next, this ultrasonic wave energy is applied to ultrasonic wave conductor 15a which contacts witg magnetron 6, and the heating current is flown to auxiliary heater 19 which is wounded around the outside of conductor 15a, thereby emitting gas absored on the electrode surface of magnetron 6. After that, when the vacuum degree in magnetron 6 becomes proper, electricity is supplied to electrode terminal 6b to heat the filament electrode, and oxide is activated to continue exhausting. After that, conductor 15a is removed to apply the high voltage from power source 18 to electrode terminal 6b, and an electron impulse is given to the anode inside wall to emit gas, thereby enhancing the vacuum degree further.
COPYRIGHT: (C)1979,JPO&Japio
JP15555577A 1977-12-26 1977-12-26 Exhausting method of electronic tube Pending JPS5488060A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15555577A JPS5488060A (en) 1977-12-26 1977-12-26 Exhausting method of electronic tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15555577A JPS5488060A (en) 1977-12-26 1977-12-26 Exhausting method of electronic tube

Publications (1)

Publication Number Publication Date
JPS5488060A true JPS5488060A (en) 1979-07-12

Family

ID=15608612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15555577A Pending JPS5488060A (en) 1977-12-26 1977-12-26 Exhausting method of electronic tube

Country Status (1)

Country Link
JP (1) JPS5488060A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2644553C1 (en) * 2016-09-23 2018-02-13 Акционерное общество "Плутон" Method of vtd exhaust
CN114273713A (en) * 2021-12-30 2022-04-05 中国电子科技集团公司第二十六研究所 Clamping and sealing method for hemispherical resonator gyroscope ultrahigh vacuum degree exhaust equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2644553C1 (en) * 2016-09-23 2018-02-13 Акционерное общество "Плутон" Method of vtd exhaust
CN114273713A (en) * 2021-12-30 2022-04-05 中国电子科技集团公司第二十六研究所 Clamping and sealing method for hemispherical resonator gyroscope ultrahigh vacuum degree exhaust equipment
CN114273713B (en) * 2021-12-30 2024-04-05 中国电子科技集团公司第二十六研究所 Clamping and sealing method for hemispherical resonator gyro ultrahigh vacuum exhaust equipment

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