JPS5484474A - Doping film and method of using same - Google Patents
Doping film and method of using sameInfo
- Publication number
- JPS5484474A JPS5484474A JP15216977A JP15216977A JPS5484474A JP S5484474 A JPS5484474 A JP S5484474A JP 15216977 A JP15216977 A JP 15216977A JP 15216977 A JP15216977 A JP 15216977A JP S5484474 A JPS5484474 A JP S5484474A
- Authority
- JP
- Japan
- Prior art keywords
- same
- doping film
- doping
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15216977A JPS5932054B2 (ja) | 1977-12-17 | 1977-12-17 | ド−パントフィルムとその使用方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15216977A JPS5932054B2 (ja) | 1977-12-17 | 1977-12-17 | ド−パントフィルムとその使用方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5484474A true JPS5484474A (en) | 1979-07-05 |
JPS5932054B2 JPS5932054B2 (ja) | 1984-08-06 |
Family
ID=15534534
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15216977A Expired JPS5932054B2 (ja) | 1977-12-17 | 1977-12-17 | ド−パントフィルムとその使用方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5932054B2 (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01112724A (ja) * | 1987-10-27 | 1989-05-01 | Tokyo Ohka Kogyo Co Ltd | ドーパントフィルムの製造方法 |
US4985293A (en) * | 1989-08-14 | 1991-01-15 | Eastman Kodak Company | Polymer blend for molded circuit boards and other selectively conductive molded devices |
US5024867A (en) * | 1987-10-28 | 1991-06-18 | Kabushiki Kaisha Toshiba | Dopant film and methods of diffusing impurity into and manufacturing a semiconductor wafer |
US5094976A (en) * | 1988-07-14 | 1992-03-10 | Kabushiki Kaisha Toshiba | Dopant film and methods of diffusing impurity into and manufacturing a semiconductor wafer |
JP2010062334A (ja) * | 2008-09-03 | 2010-03-18 | Japan Vam & Poval Co Ltd | リン拡散用塗布液 |
JP2010062223A (ja) * | 2008-09-01 | 2010-03-18 | Japan Vam & Poval Co Ltd | ホウ素拡散用塗布液 |
JP6472936B1 (ja) * | 2018-02-02 | 2019-02-20 | 新電元工業株式会社 | 半導体不純物液体ソース、半導体不純物液体ソースの製造方法および半導体装置の製造方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6100471B2 (ja) * | 2012-03-29 | 2017-03-22 | 東京応化工業株式会社 | 不純物拡散成分の拡散方法、及び太陽電池の製造方法 |
-
1977
- 1977-12-17 JP JP15216977A patent/JPS5932054B2/ja not_active Expired
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01112724A (ja) * | 1987-10-27 | 1989-05-01 | Tokyo Ohka Kogyo Co Ltd | ドーパントフィルムの製造方法 |
US5024867A (en) * | 1987-10-28 | 1991-06-18 | Kabushiki Kaisha Toshiba | Dopant film and methods of diffusing impurity into and manufacturing a semiconductor wafer |
US5073517A (en) * | 1987-10-28 | 1991-12-17 | Kabushiki Kaisha Toshiba | Dopant film and methods of diffusing impurity into and manufacturing a semiconductor wafer |
US5094976A (en) * | 1988-07-14 | 1992-03-10 | Kabushiki Kaisha Toshiba | Dopant film and methods of diffusing impurity into and manufacturing a semiconductor wafer |
US4985293A (en) * | 1989-08-14 | 1991-01-15 | Eastman Kodak Company | Polymer blend for molded circuit boards and other selectively conductive molded devices |
JP2010062223A (ja) * | 2008-09-01 | 2010-03-18 | Japan Vam & Poval Co Ltd | ホウ素拡散用塗布液 |
JP2010062334A (ja) * | 2008-09-03 | 2010-03-18 | Japan Vam & Poval Co Ltd | リン拡散用塗布液 |
JP6472936B1 (ja) * | 2018-02-02 | 2019-02-20 | 新電元工業株式会社 | 半導体不純物液体ソース、半導体不純物液体ソースの製造方法および半導体装置の製造方法 |
WO2019150548A1 (ja) * | 2018-02-02 | 2019-08-08 | 新電元工業株式会社 | 半導体不純物液体ソース、半導体不純物液体ソースの製造方法および半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS5932054B2 (ja) | 1984-08-06 |
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