JPS5483368U - - Google Patents
Info
- Publication number
- JPS5483368U JPS5483368U JP15304677U JP15304677U JPS5483368U JP S5483368 U JPS5483368 U JP S5483368U JP 15304677 U JP15304677 U JP 15304677U JP 15304677 U JP15304677 U JP 15304677U JP S5483368 U JPS5483368 U JP S5483368U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15304677U JPS5552677Y2 (cs) | 1977-11-15 | 1977-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15304677U JPS5552677Y2 (cs) | 1977-11-15 | 1977-11-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5483368U true JPS5483368U (cs) | 1979-06-13 |
| JPS5552677Y2 JPS5552677Y2 (cs) | 1980-12-06 |
Family
ID=29139850
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15304677U Expired JPS5552677Y2 (cs) | 1977-11-15 | 1977-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5552677Y2 (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6043655A (ja) * | 1983-08-22 | 1985-03-08 | Toshiba Corp | レジストパタ−ンの形成方法 |
-
1977
- 1977-11-15 JP JP15304677U patent/JPS5552677Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6043655A (ja) * | 1983-08-22 | 1985-03-08 | Toshiba Corp | レジストパタ−ンの形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5552677Y2 (cs) | 1980-12-06 |