JPS5483368U - - Google Patents

Info

Publication number
JPS5483368U
JPS5483368U JP15304677U JP15304677U JPS5483368U JP S5483368 U JPS5483368 U JP S5483368U JP 15304677 U JP15304677 U JP 15304677U JP 15304677 U JP15304677 U JP 15304677U JP S5483368 U JPS5483368 U JP S5483368U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15304677U
Other languages
Japanese (ja)
Other versions
JPS5552677Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15304677U priority Critical patent/JPS5552677Y2/ja
Publication of JPS5483368U publication Critical patent/JPS5483368U/ja
Application granted granted Critical
Publication of JPS5552677Y2 publication Critical patent/JPS5552677Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP15304677U 1977-11-15 1977-11-15 Expired JPS5552677Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15304677U JPS5552677Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-11-15 1977-11-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15304677U JPS5552677Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-11-15 1977-11-15

Publications (2)

Publication Number Publication Date
JPS5483368U true JPS5483368U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-06-13
JPS5552677Y2 JPS5552677Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-12-06

Family

ID=29139850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15304677U Expired JPS5552677Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-11-15 1977-11-15

Country Status (1)

Country Link
JP (1) JPS5552677Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6043655A (ja) * 1983-08-22 1985-03-08 Toshiba Corp レジストパタ−ンの形成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6043655A (ja) * 1983-08-22 1985-03-08 Toshiba Corp レジストパタ−ンの形成方法

Also Published As

Publication number Publication date
JPS5552677Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-12-06

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