JPS548071B2 - - Google Patents
Info
- Publication number
- JPS548071B2 JPS548071B2 JP2849776A JP2849776A JPS548071B2 JP S548071 B2 JPS548071 B2 JP S548071B2 JP 2849776 A JP2849776 A JP 2849776A JP 2849776 A JP2849776 A JP 2849776A JP S548071 B2 JPS548071 B2 JP S548071B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2849776A JPS52112196A (en) | 1976-03-16 | 1976-03-16 | Electron beam exposure apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2849776A JPS52112196A (en) | 1976-03-16 | 1976-03-16 | Electron beam exposure apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52112196A JPS52112196A (en) | 1977-09-20 |
| JPS548071B2 true JPS548071B2 (show.php) | 1979-04-12 |
Family
ID=12250299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2849776A Granted JPS52112196A (en) | 1976-03-16 | 1976-03-16 | Electron beam exposure apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52112196A (show.php) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5463681A (en) * | 1977-10-29 | 1979-05-22 | Nippon Aviotronics Kk | Electron beam exposure device |
| US5173582A (en) * | 1988-10-31 | 1992-12-22 | Fujitsu Limited | Charged particle beam lithography system and method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5320391A (en) * | 1976-08-09 | 1978-02-24 | Becton Dickinson Co | Blood inspection apparatus |
-
1976
- 1976-03-16 JP JP2849776A patent/JPS52112196A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52112196A (en) | 1977-09-20 |