JPS5474378A - Method of automatically centering mask - Google Patents
Method of automatically centering maskInfo
- Publication number
- JPS5474378A JPS5474378A JP14176777A JP14176777A JPS5474378A JP S5474378 A JPS5474378 A JP S5474378A JP 14176777 A JP14176777 A JP 14176777A JP 14176777 A JP14176777 A JP 14176777A JP S5474378 A JPS5474378 A JP S5474378A
- Authority
- JP
- Japan
- Prior art keywords
- automatically centering
- mask
- centering mask
- automatically
- centering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52141767A JPS5952537B2 (en) | 1977-11-25 | 1977-11-25 | Automatic mask matching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52141767A JPS5952537B2 (en) | 1977-11-25 | 1977-11-25 | Automatic mask matching method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5474378A true JPS5474378A (en) | 1979-06-14 |
JPS5952537B2 JPS5952537B2 (en) | 1984-12-20 |
Family
ID=15299693
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52141767A Expired JPS5952537B2 (en) | 1977-11-25 | 1977-11-25 | Automatic mask matching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5952537B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5649537A (en) * | 1979-09-28 | 1981-05-06 | Nec Corp | Semiconductor wafer |
JPS5650525A (en) * | 1979-10-01 | 1981-05-07 | Nec Corp | Semiconductor wafer |
JPS5651838A (en) * | 1979-10-05 | 1981-05-09 | Nec Corp | Semiconductor device |
JPS60173825A (en) * | 1984-02-14 | 1985-09-07 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor substrate having discriminating code |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53137673A (en) * | 1977-05-03 | 1978-12-01 | Massachusetts Inst Technology | Device for and method of matching plate position |
-
1977
- 1977-11-25 JP JP52141767A patent/JPS5952537B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53137673A (en) * | 1977-05-03 | 1978-12-01 | Massachusetts Inst Technology | Device for and method of matching plate position |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5649537A (en) * | 1979-09-28 | 1981-05-06 | Nec Corp | Semiconductor wafer |
JPS5650525A (en) * | 1979-10-01 | 1981-05-07 | Nec Corp | Semiconductor wafer |
JPS6317226B2 (en) * | 1979-10-01 | 1988-04-13 | Nippon Electric Co | |
JPS5651838A (en) * | 1979-10-05 | 1981-05-09 | Nec Corp | Semiconductor device |
JPS60173825A (en) * | 1984-02-14 | 1985-09-07 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor substrate having discriminating code |
Also Published As
Publication number | Publication date |
---|---|
JPS5952537B2 (en) | 1984-12-20 |
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