JPS5474378A - Method of automatically centering mask - Google Patents

Method of automatically centering mask

Info

Publication number
JPS5474378A
JPS5474378A JP14176777A JP14176777A JPS5474378A JP S5474378 A JPS5474378 A JP S5474378A JP 14176777 A JP14176777 A JP 14176777A JP 14176777 A JP14176777 A JP 14176777A JP S5474378 A JPS5474378 A JP S5474378A
Authority
JP
Japan
Prior art keywords
automatically centering
mask
centering mask
automatically
centering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14176777A
Other languages
Japanese (ja)
Other versions
JPS5952537B2 (en
Inventor
Takuma Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP52141767A priority Critical patent/JPS5952537B2/en
Publication of JPS5474378A publication Critical patent/JPS5474378A/en
Publication of JPS5952537B2 publication Critical patent/JPS5952537B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP52141767A 1977-11-25 1977-11-25 Automatic mask matching method Expired JPS5952537B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52141767A JPS5952537B2 (en) 1977-11-25 1977-11-25 Automatic mask matching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52141767A JPS5952537B2 (en) 1977-11-25 1977-11-25 Automatic mask matching method

Publications (2)

Publication Number Publication Date
JPS5474378A true JPS5474378A (en) 1979-06-14
JPS5952537B2 JPS5952537B2 (en) 1984-12-20

Family

ID=15299693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52141767A Expired JPS5952537B2 (en) 1977-11-25 1977-11-25 Automatic mask matching method

Country Status (1)

Country Link
JP (1) JPS5952537B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5649537A (en) * 1979-09-28 1981-05-06 Nec Corp Semiconductor wafer
JPS5650525A (en) * 1979-10-01 1981-05-07 Nec Corp Semiconductor wafer
JPS5651838A (en) * 1979-10-05 1981-05-09 Nec Corp Semiconductor device
JPS60173825A (en) * 1984-02-14 1985-09-07 Nippon Telegr & Teleph Corp <Ntt> Semiconductor substrate having discriminating code

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53137673A (en) * 1977-05-03 1978-12-01 Massachusetts Inst Technology Device for and method of matching plate position

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53137673A (en) * 1977-05-03 1978-12-01 Massachusetts Inst Technology Device for and method of matching plate position

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5649537A (en) * 1979-09-28 1981-05-06 Nec Corp Semiconductor wafer
JPS5650525A (en) * 1979-10-01 1981-05-07 Nec Corp Semiconductor wafer
JPS6317226B2 (en) * 1979-10-01 1988-04-13 Nippon Electric Co
JPS5651838A (en) * 1979-10-05 1981-05-09 Nec Corp Semiconductor device
JPS60173825A (en) * 1984-02-14 1985-09-07 Nippon Telegr & Teleph Corp <Ntt> Semiconductor substrate having discriminating code

Also Published As

Publication number Publication date
JPS5952537B2 (en) 1984-12-20

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