JPS547276A - Fine adjustment unit for stage - Google Patents

Fine adjustment unit for stage

Info

Publication number
JPS547276A
JPS547276A JP7314377A JP7314377A JPS547276A JP S547276 A JPS547276 A JP S547276A JP 7314377 A JP7314377 A JP 7314377A JP 7314377 A JP7314377 A JP 7314377A JP S547276 A JPS547276 A JP S547276A
Authority
JP
Japan
Prior art keywords
stage
adjustment unit
fine adjustment
fluid flowing
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7314377A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5612014B2 (enrdf_load_stackoverflow
Inventor
Toshiyuki Horiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP7314377A priority Critical patent/JPS547276A/ja
Publication of JPS547276A publication Critical patent/JPS547276A/ja
Publication of JPS5612014B2 publication Critical patent/JPS5612014B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Diaphragms And Bellows (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
JP7314377A 1977-06-20 1977-06-20 Fine adjustment unit for stage Granted JPS547276A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7314377A JPS547276A (en) 1977-06-20 1977-06-20 Fine adjustment unit for stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7314377A JPS547276A (en) 1977-06-20 1977-06-20 Fine adjustment unit for stage

Publications (2)

Publication Number Publication Date
JPS547276A true JPS547276A (en) 1979-01-19
JPS5612014B2 JPS5612014B2 (enrdf_load_stackoverflow) 1981-03-18

Family

ID=13509673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7314377A Granted JPS547276A (en) 1977-06-20 1977-06-20 Fine adjustment unit for stage

Country Status (1)

Country Link
JP (1) JPS547276A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6332949A (ja) * 1986-07-24 1988-02-12 Yokogawa Hewlett Packard Ltd 熱間チャック装置
US4778143A (en) * 1984-06-15 1988-10-18 Omron Tateisi Electronics Co. Apparatus for locking movable table

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0345810U (enrdf_load_stackoverflow) * 1989-09-11 1991-04-26

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4921467A (enrdf_load_stackoverflow) * 1972-06-20 1974-02-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4921467A (enrdf_load_stackoverflow) * 1972-06-20 1974-02-25

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4778143A (en) * 1984-06-15 1988-10-18 Omron Tateisi Electronics Co. Apparatus for locking movable table
JPS6332949A (ja) * 1986-07-24 1988-02-12 Yokogawa Hewlett Packard Ltd 熱間チャック装置

Also Published As

Publication number Publication date
JPS5612014B2 (enrdf_load_stackoverflow) 1981-03-18

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