JPS5472077A - Pattern inspection apparatus - Google Patents
Pattern inspection apparatusInfo
- Publication number
- JPS5472077A JPS5472077A JP13843377A JP13843377A JPS5472077A JP S5472077 A JPS5472077 A JP S5472077A JP 13843377 A JP13843377 A JP 13843377A JP 13843377 A JP13843377 A JP 13843377A JP S5472077 A JPS5472077 A JP S5472077A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- dimensional
- counters
- picture
- frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To realize high precision, stable pattern recognition, by composing a local two-dimensional region with sequential scanning type two-dimensional image pickup means which scans the two-dimensional pattern being inspected both in the first and second directions, and detecting slight pattern changes.
CONSTITUTION: The picture signal from a television camera 21 is picture divided by a binary dividing circuit 22, and is sequentially written into a two-dimensional local memory 23 composed of multi-layer shift registers. The output read out from the two-dimensional local memory 23 is supplied to first to sixth digital low pass filters 24 to 29, and the coefficients with respect to each frequency, or passing frequencies of filters 24 to 29 with respect to the cut-off frequency, are accumulated in first to sixth counters 35 to 40. A judging circuit 41, when the scanning of one picture is over, compares each integrated value of first to sixth counters 35 to 40 with the preset value 42 to judge the pattern. In this case, the sum of counting values by counters 35 to 40 is nearly equal to the area of the pattern in question.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13843377A JPS5840683B2 (en) | 1977-11-19 | 1977-11-19 | pattern inspection equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13843377A JPS5840683B2 (en) | 1977-11-19 | 1977-11-19 | pattern inspection equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5472077A true JPS5472077A (en) | 1979-06-09 |
JPS5840683B2 JPS5840683B2 (en) | 1983-09-07 |
Family
ID=15221851
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13843377A Expired JPS5840683B2 (en) | 1977-11-19 | 1977-11-19 | pattern inspection equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5840683B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57188823A (en) * | 1981-05-15 | 1982-11-19 | Nippon Kogaku Kk <Nikon> | Inspecting device for pattern |
-
1977
- 1977-11-19 JP JP13843377A patent/JPS5840683B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57188823A (en) * | 1981-05-15 | 1982-11-19 | Nippon Kogaku Kk <Nikon> | Inspecting device for pattern |
JPH02853B2 (en) * | 1981-05-15 | 1990-01-09 | Nippon Kogaku Kk |
Also Published As
Publication number | Publication date |
---|---|
JPS5840683B2 (en) | 1983-09-07 |
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