JPS5472077A - Pattern inspection apparatus - Google Patents

Pattern inspection apparatus

Info

Publication number
JPS5472077A
JPS5472077A JP13843377A JP13843377A JPS5472077A JP S5472077 A JPS5472077 A JP S5472077A JP 13843377 A JP13843377 A JP 13843377A JP 13843377 A JP13843377 A JP 13843377A JP S5472077 A JPS5472077 A JP S5472077A
Authority
JP
Japan
Prior art keywords
pattern
dimensional
counters
picture
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13843377A
Other languages
Japanese (ja)
Other versions
JPS5840683B2 (en
Inventor
Michiaki Miyagawa
Masao Nito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP13843377A priority Critical patent/JPS5840683B2/en
Publication of JPS5472077A publication Critical patent/JPS5472077A/en
Publication of JPS5840683B2 publication Critical patent/JPS5840683B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To realize high precision, stable pattern recognition, by composing a local two-dimensional region with sequential scanning type two-dimensional image pickup means which scans the two-dimensional pattern being inspected both in the first and second directions, and detecting slight pattern changes.
CONSTITUTION: The picture signal from a television camera 21 is picture divided by a binary dividing circuit 22, and is sequentially written into a two-dimensional local memory 23 composed of multi-layer shift registers. The output read out from the two-dimensional local memory 23 is supplied to first to sixth digital low pass filters 24 to 29, and the coefficients with respect to each frequency, or passing frequencies of filters 24 to 29 with respect to the cut-off frequency, are accumulated in first to sixth counters 35 to 40. A judging circuit 41, when the scanning of one picture is over, compares each integrated value of first to sixth counters 35 to 40 with the preset value 42 to judge the pattern. In this case, the sum of counting values by counters 35 to 40 is nearly equal to the area of the pattern in question.
COPYRIGHT: (C)1979,JPO&Japio
JP13843377A 1977-11-19 1977-11-19 pattern inspection equipment Expired JPS5840683B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13843377A JPS5840683B2 (en) 1977-11-19 1977-11-19 pattern inspection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13843377A JPS5840683B2 (en) 1977-11-19 1977-11-19 pattern inspection equipment

Publications (2)

Publication Number Publication Date
JPS5472077A true JPS5472077A (en) 1979-06-09
JPS5840683B2 JPS5840683B2 (en) 1983-09-07

Family

ID=15221851

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13843377A Expired JPS5840683B2 (en) 1977-11-19 1977-11-19 pattern inspection equipment

Country Status (1)

Country Link
JP (1) JPS5840683B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57188823A (en) * 1981-05-15 1982-11-19 Nippon Kogaku Kk <Nikon> Inspecting device for pattern

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57188823A (en) * 1981-05-15 1982-11-19 Nippon Kogaku Kk <Nikon> Inspecting device for pattern
JPH02853B2 (en) * 1981-05-15 1990-01-09 Nippon Kogaku Kk

Also Published As

Publication number Publication date
JPS5840683B2 (en) 1983-09-07

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