JPS547193B2 - - Google Patents
Info
- Publication number
- JPS547193B2 JPS547193B2 JP9151471A JP9151471A JPS547193B2 JP S547193 B2 JPS547193 B2 JP S547193B2 JP 9151471 A JP9151471 A JP 9151471A JP 9151471 A JP9151471 A JP 9151471A JP S547193 B2 JPS547193 B2 JP S547193B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Bipolar Transistors (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9151471A JPS547193B2 (enExample) | 1971-11-17 | 1971-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9151471A JPS547193B2 (enExample) | 1971-11-17 | 1971-11-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4856377A JPS4856377A (enExample) | 1973-08-08 |
| JPS547193B2 true JPS547193B2 (enExample) | 1979-04-04 |
Family
ID=14028499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9151471A Expired JPS547193B2 (enExample) | 1971-11-17 | 1971-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS547193B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52145897A (en) * | 1976-05-28 | 1977-12-05 | Mitsubishi Electric Corp | Positioning method for machining using ultra-fine electron beam |
| JPS5627927A (en) * | 1979-08-14 | 1981-03-18 | Toshiba Corp | Location in electron beam injection |
-
1971
- 1971-11-17 JP JP9151471A patent/JPS547193B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4856377A (enExample) | 1973-08-08 |