JPS547193B2 - - Google Patents

Info

Publication number
JPS547193B2
JPS547193B2 JP9151471A JP9151471A JPS547193B2 JP S547193 B2 JPS547193 B2 JP S547193B2 JP 9151471 A JP9151471 A JP 9151471A JP 9151471 A JP9151471 A JP 9151471A JP S547193 B2 JPS547193 B2 JP S547193B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9151471A
Other languages
Japanese (ja)
Other versions
JPS4856377A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9151471A priority Critical patent/JPS547193B2/ja
Publication of JPS4856377A publication Critical patent/JPS4856377A/ja
Publication of JPS547193B2 publication Critical patent/JPS547193B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Electron Beam Exposure (AREA)
JP9151471A 1971-11-17 1971-11-17 Expired JPS547193B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9151471A JPS547193B2 (enrdf_load_stackoverflow) 1971-11-17 1971-11-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9151471A JPS547193B2 (enrdf_load_stackoverflow) 1971-11-17 1971-11-17

Publications (2)

Publication Number Publication Date
JPS4856377A JPS4856377A (enrdf_load_stackoverflow) 1973-08-08
JPS547193B2 true JPS547193B2 (enrdf_load_stackoverflow) 1979-04-04

Family

ID=14028499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9151471A Expired JPS547193B2 (enrdf_load_stackoverflow) 1971-11-17 1971-11-17

Country Status (1)

Country Link
JP (1) JPS547193B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52145897A (en) * 1976-05-28 1977-12-05 Mitsubishi Electric Corp Positioning method for machining using ultra-fine electron beam
JPS5627927A (en) * 1979-08-14 1981-03-18 Toshiba Corp Location in electron beam injection

Also Published As

Publication number Publication date
JPS4856377A (enrdf_load_stackoverflow) 1973-08-08

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