JPS5469145U - - Google Patents

Info

Publication number
JPS5469145U
JPS5469145U JP14438377U JP14438377U JPS5469145U JP S5469145 U JPS5469145 U JP S5469145U JP 14438377 U JP14438377 U JP 14438377U JP 14438377 U JP14438377 U JP 14438377U JP S5469145 U JPS5469145 U JP S5469145U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14438377U
Other languages
Japanese (ja)
Other versions
JPS5740302Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977144383U priority Critical patent/JPS5740302Y2/ja
Publication of JPS5469145U publication Critical patent/JPS5469145U/ja
Application granted granted Critical
Publication of JPS5740302Y2 publication Critical patent/JPS5740302Y2/ja
Expired legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
JP1977144383U 1977-10-27 1977-10-27 Expired JPS5740302Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977144383U JPS5740302Y2 (enrdf_load_stackoverflow) 1977-10-27 1977-10-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977144383U JPS5740302Y2 (enrdf_load_stackoverflow) 1977-10-27 1977-10-27

Publications (2)

Publication Number Publication Date
JPS5469145U true JPS5469145U (enrdf_load_stackoverflow) 1979-05-16
JPS5740302Y2 JPS5740302Y2 (enrdf_load_stackoverflow) 1982-09-04

Family

ID=29122945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977144383U Expired JPS5740302Y2 (enrdf_load_stackoverflow) 1977-10-27 1977-10-27

Country Status (1)

Country Link
JP (1) JPS5740302Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014122371A (ja) * 2012-12-20 2014-07-03 Mitsubishi Electric Corp 蒸着装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5183053U (enrdf_load_stackoverflow) * 1974-12-26 1976-07-03
JPS5185053U (enrdf_load_stackoverflow) * 1974-12-27 1976-07-08
JPS52139345U (enrdf_load_stackoverflow) * 1976-04-15 1977-10-22

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5183053U (enrdf_load_stackoverflow) * 1974-12-26 1976-07-03
JPS5185053U (enrdf_load_stackoverflow) * 1974-12-27 1976-07-08
JPS52139345U (enrdf_load_stackoverflow) * 1976-04-15 1977-10-22

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014122371A (ja) * 2012-12-20 2014-07-03 Mitsubishi Electric Corp 蒸着装置

Also Published As

Publication number Publication date
JPS5740302Y2 (enrdf_load_stackoverflow) 1982-09-04

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