JPS5464460U - - Google Patents

Info

Publication number
JPS5464460U
JPS5464460U JP13676177U JP13676177U JPS5464460U JP S5464460 U JPS5464460 U JP S5464460U JP 13676177 U JP13676177 U JP 13676177U JP 13676177 U JP13676177 U JP 13676177U JP S5464460 U JPS5464460 U JP S5464460U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13676177U
Other languages
Japanese (ja)
Other versions
JPS5639223Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13676177U priority Critical patent/JPS5639223Y2/ja
Publication of JPS5464460U publication Critical patent/JPS5464460U/ja
Application granted granted Critical
Publication of JPS5639223Y2 publication Critical patent/JPS5639223Y2/ja
Expired legal-status Critical Current

Links

JP13676177U 1977-10-14 1977-10-14 Expired JPS5639223Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13676177U JPS5639223Y2 (cg-RX-API-DMAC7.html) 1977-10-14 1977-10-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13676177U JPS5639223Y2 (cg-RX-API-DMAC7.html) 1977-10-14 1977-10-14

Publications (2)

Publication Number Publication Date
JPS5464460U true JPS5464460U (cg-RX-API-DMAC7.html) 1979-05-08
JPS5639223Y2 JPS5639223Y2 (cg-RX-API-DMAC7.html) 1981-09-12

Family

ID=29108298

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13676177U Expired JPS5639223Y2 (cg-RX-API-DMAC7.html) 1977-10-14 1977-10-14

Country Status (1)

Country Link
JP (1) JPS5639223Y2 (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS561526A (en) * 1979-06-15 1981-01-09 Matsushita Electric Ind Co Ltd Substrate holding jig for substrate treatment
JPS6337629A (ja) * 1986-07-31 1988-02-18 Tokyo Electron Ltd プラズマ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS561526A (en) * 1979-06-15 1981-01-09 Matsushita Electric Ind Co Ltd Substrate holding jig for substrate treatment
JPS6337629A (ja) * 1986-07-31 1988-02-18 Tokyo Electron Ltd プラズマ装置

Also Published As

Publication number Publication date
JPS5639223Y2 (cg-RX-API-DMAC7.html) 1981-09-12

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