JPS5461563U - - Google Patents

Info

Publication number
JPS5461563U
JPS5461563U JP13607377U JP13607377U JPS5461563U JP S5461563 U JPS5461563 U JP S5461563U JP 13607377 U JP13607377 U JP 13607377U JP 13607377 U JP13607377 U JP 13607377U JP S5461563 U JPS5461563 U JP S5461563U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13607377U
Other languages
Japanese (ja)
Other versions
JPS583298Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977136073U priority Critical patent/JPS583298Y2/ja
Publication of JPS5461563U publication Critical patent/JPS5461563U/ja
Application granted granted Critical
Publication of JPS583298Y2 publication Critical patent/JPS583298Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP1977136073U 1977-10-11 1977-10-11 電子ビ−ム露光用基板ホルダ− Expired JPS583298Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977136073U JPS583298Y2 (ja) 1977-10-11 1977-10-11 電子ビ−ム露光用基板ホルダ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977136073U JPS583298Y2 (ja) 1977-10-11 1977-10-11 電子ビ−ム露光用基板ホルダ−

Publications (2)

Publication Number Publication Date
JPS5461563U true JPS5461563U (enrdf_load_stackoverflow) 1979-04-28
JPS583298Y2 JPS583298Y2 (ja) 1983-01-20

Family

ID=29106975

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977136073U Expired JPS583298Y2 (ja) 1977-10-11 1977-10-11 電子ビ−ム露光用基板ホルダ−

Country Status (1)

Country Link
JP (1) JPS583298Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS526084A (en) * 1975-06-30 1977-01-18 Ibm Device for positioning specimen
JPS5260074A (en) * 1975-11-12 1977-05-18 Jeol Ltd Charge particle beam apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS526084A (en) * 1975-06-30 1977-01-18 Ibm Device for positioning specimen
JPS5260074A (en) * 1975-11-12 1977-05-18 Jeol Ltd Charge particle beam apparatus

Also Published As

Publication number Publication date
JPS583298Y2 (ja) 1983-01-20

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