JPS5460572A - Method of forming pattern - Google Patents

Method of forming pattern

Info

Publication number
JPS5460572A
JPS5460572A JP12745577A JP12745577A JPS5460572A JP S5460572 A JPS5460572 A JP S5460572A JP 12745577 A JP12745577 A JP 12745577A JP 12745577 A JP12745577 A JP 12745577A JP S5460572 A JPS5460572 A JP S5460572A
Authority
JP
Japan
Prior art keywords
forming pattern
pattern
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12745577A
Other languages
Japanese (ja)
Inventor
Kiyokatsu Jinno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP12745577A priority Critical patent/JPS5460572A/en
Publication of JPS5460572A publication Critical patent/JPS5460572A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Drying Of Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP12745577A 1977-10-24 1977-10-24 Method of forming pattern Pending JPS5460572A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12745577A JPS5460572A (en) 1977-10-24 1977-10-24 Method of forming pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12745577A JPS5460572A (en) 1977-10-24 1977-10-24 Method of forming pattern

Publications (1)

Publication Number Publication Date
JPS5460572A true JPS5460572A (en) 1979-05-16

Family

ID=14960344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12745577A Pending JPS5460572A (en) 1977-10-24 1977-10-24 Method of forming pattern

Country Status (1)

Country Link
JP (1) JPS5460572A (en)

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