JPS5456689A - Radiation-sensitive composition - Google Patents
Radiation-sensitive compositionInfo
- Publication number
- JPS5456689A JPS5456689A JP12277277A JP12277277A JPS5456689A JP S5456689 A JPS5456689 A JP S5456689A JP 12277277 A JP12277277 A JP 12277277A JP 12277277 A JP12277277 A JP 12277277A JP S5456689 A JPS5456689 A JP S5456689A
- Authority
- JP
- Japan
- Prior art keywords
- radiation
- resist material
- sensitive composition
- reaction inhibitor
- acid monoester
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Macromonomer-Based Addition Polymer (AREA)
- Thermal Transfer Or Thermal Recording In General (AREA)
- Polymerisation Methods In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12277277A JPS5456689A (en) | 1977-10-12 | 1977-10-12 | Radiation-sensitive composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12277277A JPS5456689A (en) | 1977-10-12 | 1977-10-12 | Radiation-sensitive composition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5456689A true JPS5456689A (en) | 1979-05-07 |
| JPS6142250B2 JPS6142250B2 (esLanguage) | 1986-09-19 |
Family
ID=14844222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12277277A Granted JPS5456689A (en) | 1977-10-12 | 1977-10-12 | Radiation-sensitive composition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5456689A (esLanguage) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58502169A (ja) * | 1981-12-21 | 1983-12-15 | インステイテユ−ト ヒミイ アカデミイ ナウク エスエスエスア−ル | フォト−及び電子線レジスト |
-
1977
- 1977-10-12 JP JP12277277A patent/JPS5456689A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58502169A (ja) * | 1981-12-21 | 1983-12-15 | インステイテユ−ト ヒミイ アカデミイ ナウク エスエスエスア−ル | フォト−及び電子線レジスト |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6142250B2 (esLanguage) | 1986-09-19 |
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