JPS5456689A - Radiation-sensitive composition - Google Patents
Radiation-sensitive compositionInfo
- Publication number
- JPS5456689A JPS5456689A JP12277277A JP12277277A JPS5456689A JP S5456689 A JPS5456689 A JP S5456689A JP 12277277 A JP12277277 A JP 12277277A JP 12277277 A JP12277277 A JP 12277277A JP S5456689 A JPS5456689 A JP S5456689A
- Authority
- JP
- Japan
- Prior art keywords
- radiation
- resist material
- sensitive composition
- reaction inhibitor
- acid monoester
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005855 radiation Effects 0.000 title abstract 4
- 125000003700 epoxy group Chemical group 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- 239000002683 reaction inhibitor Substances 0.000 abstract 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 abstract 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 abstract 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 abstract 1
- 239000007795 chemical reaction product Substances 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 abstract 1
- ILUAAIDVFMVTAU-UHFFFAOYSA-N cyclohex-4-ene-1,2-dicarboxylic acid Chemical compound OC(=O)C1CC=CCC1C(O)=O ILUAAIDVFMVTAU-UHFFFAOYSA-N 0.000 abstract 1
- -1 diphenylpicrylhydroxyl Chemical group 0.000 abstract 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 abstract 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 abstract 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 abstract 1
- 239000011976 maleic acid Substances 0.000 abstract 1
- 229910017604 nitric acid Inorganic materials 0.000 abstract 1
- JFHBKKGEVRVZPE-UHFFFAOYSA-N oxiran-2-ylmethyl 4-ethenylbenzoate Chemical compound C1=CC(C=C)=CC=C1C(=O)OCC1OC1 JFHBKKGEVRVZPE-UHFFFAOYSA-N 0.000 abstract 1
- 229920002454 poly(glycidyl methacrylate) polymer Polymers 0.000 abstract 1
- 238000003847 radiation curing Methods 0.000 abstract 1
- 239000002516 radical scavenger Substances 0.000 abstract 1
- 238000007142 ring opening reaction Methods 0.000 abstract 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 abstract 1
- 235000021122 unsaturated fatty acids Nutrition 0.000 abstract 1
- 150000004670 unsaturated fatty acids Chemical class 0.000 abstract 1
- 230000004304 visual acuity Effects 0.000 abstract 1
Landscapes
- Macromonomer-Based Addition Polymer (AREA)
- Thermal Transfer Or Thermal Recording In General (AREA)
- Polymerisation Methods In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12277277A JPS5456689A (en) | 1977-10-12 | 1977-10-12 | Radiation-sensitive composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12277277A JPS5456689A (en) | 1977-10-12 | 1977-10-12 | Radiation-sensitive composition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5456689A true JPS5456689A (en) | 1979-05-07 |
| JPS6142250B2 JPS6142250B2 (enrdf_load_stackoverflow) | 1986-09-19 |
Family
ID=14844222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12277277A Granted JPS5456689A (en) | 1977-10-12 | 1977-10-12 | Radiation-sensitive composition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5456689A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58502169A (ja) * | 1981-12-21 | 1983-12-15 | インステイテユ−ト ヒミイ アカデミイ ナウク エスエスエスア−ル | フォト−及び電子線レジスト |
-
1977
- 1977-10-12 JP JP12277277A patent/JPS5456689A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58502169A (ja) * | 1981-12-21 | 1983-12-15 | インステイテユ−ト ヒミイ アカデミイ ナウク エスエスエスア−ル | フォト−及び電子線レジスト |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6142250B2 (enrdf_load_stackoverflow) | 1986-09-19 |
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