JPS545265B2 - - Google Patents
Info
- Publication number
- JPS545265B2 JPS545265B2 JP15090076A JP15090076A JPS545265B2 JP S545265 B2 JPS545265 B2 JP S545265B2 JP 15090076 A JP15090076 A JP 15090076A JP 15090076 A JP15090076 A JP 15090076A JP S545265 B2 JPS545265 B2 JP S545265B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15090076A JPS5375770A (en) | 1976-12-17 | 1976-12-17 | X-ray copying mask |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15090076A JPS5375770A (en) | 1976-12-17 | 1976-12-17 | X-ray copying mask |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5375770A JPS5375770A (en) | 1978-07-05 |
| JPS545265B2 true JPS545265B2 (forum.php) | 1979-03-15 |
Family
ID=15506826
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15090076A Granted JPS5375770A (en) | 1976-12-17 | 1976-12-17 | X-ray copying mask |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5375770A (forum.php) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56132343A (en) * | 1980-03-22 | 1981-10-16 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Mask for x-ray exposure and its manufacture |
| JPS58207635A (ja) * | 1982-05-28 | 1983-12-03 | Seiko Epson Corp | メンブラン・マスクの製造方法 |
| US4708919A (en) * | 1985-08-02 | 1987-11-24 | Micronix Corporation | Process for manufacturing a mask for use in X-ray photolithography using a monolithic support and resulting structure |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3742230A (en) * | 1972-06-29 | 1973-06-26 | Massachusetts Inst Technology | Soft x-ray mask support substrate |
| US3892973A (en) * | 1974-02-15 | 1975-07-01 | Bell Telephone Labor Inc | Mask structure for X-ray lithography |
-
1976
- 1976-12-17 JP JP15090076A patent/JPS5375770A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5375770A (en) | 1978-07-05 |