JPS544828B2 - - Google Patents

Info

Publication number
JPS544828B2
JPS544828B2 JP12410075A JP12410075A JPS544828B2 JP S544828 B2 JPS544828 B2 JP S544828B2 JP 12410075 A JP12410075 A JP 12410075A JP 12410075 A JP12410075 A JP 12410075A JP S544828 B2 JPS544828 B2 JP S544828B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12410075A
Other languages
Japanese (ja)
Other versions
JPS5247675A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12410075A priority Critical patent/JPS5247675A/ja
Publication of JPS5247675A publication Critical patent/JPS5247675A/ja
Publication of JPS544828B2 publication Critical patent/JPS544828B2/ja
Granted legal-status Critical Current

Links

JP12410075A 1975-10-14 1975-10-14 Process for production of semiconductor device Granted JPS5247675A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12410075A JPS5247675A (en) 1975-10-14 1975-10-14 Process for production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12410075A JPS5247675A (en) 1975-10-14 1975-10-14 Process for production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5247675A JPS5247675A (en) 1977-04-15
JPS544828B2 true JPS544828B2 (ko) 1979-03-10

Family

ID=14876915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12410075A Granted JPS5247675A (en) 1975-10-14 1975-10-14 Process for production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5247675A (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2830035C2 (de) * 1977-07-15 1984-05-17 Matsushita Electric Industrial Co., Ltd., Kadoma, Osaka Verfahren, bei arsenhaltigen Oxidfilmen auf einer Halbleitervorrichtung die Verarmung an Arsen zu verhindern
JPS5749239A (en) * 1980-09-09 1982-03-23 Toshiba Corp Manufacture of gaas device
JPS59121833A (ja) * 1982-12-27 1984-07-14 Toshiba Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5247675A (en) 1977-04-15

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