JPS5444537Y2 - - Google Patents

Info

Publication number
JPS5444537Y2
JPS5444537Y2 JP1974089020U JP8902074U JPS5444537Y2 JP S5444537 Y2 JPS5444537 Y2 JP S5444537Y2 JP 1974089020 U JP1974089020 U JP 1974089020U JP 8902074 U JP8902074 U JP 8902074U JP S5444537 Y2 JPS5444537 Y2 JP S5444537Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1974089020U
Other languages
Japanese (ja)
Other versions
JPS5117454U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1974089020U priority Critical patent/JPS5444537Y2/ja
Publication of JPS5117454U publication Critical patent/JPS5117454U/ja
Application granted granted Critical
Publication of JPS5444537Y2 publication Critical patent/JPS5444537Y2/ja
Expired legal-status Critical Current

Links

JP1974089020U 1974-07-26 1974-07-26 Expired JPS5444537Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1974089020U JPS5444537Y2 (en) 1974-07-26 1974-07-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1974089020U JPS5444537Y2 (en) 1974-07-26 1974-07-26

Publications (2)

Publication Number Publication Date
JPS5117454U JPS5117454U (en) 1976-02-07
JPS5444537Y2 true JPS5444537Y2 (en) 1979-12-21

Family

ID=28274648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1974089020U Expired JPS5444537Y2 (en) 1974-07-26 1974-07-26

Country Status (1)

Country Link
JP (1) JPS5444537Y2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS587973Y2 (en) * 1976-10-05 1983-02-12 日本電子株式会社 Beam current measuring device for electron microscope
JPS5819807Y2 (en) * 1976-11-08 1983-04-23 富士通株式会社 backscattered electron detector
JPS59161262U (en) * 1983-04-14 1984-10-29 日本電子株式会社 Aperture moving device
JP6362253B2 (en) * 2014-04-30 2018-07-25 株式会社ホロン Ultrafast electron detector and scanning electron beam inspection apparatus incorporating the detector
DE112018007212T5 (en) * 2018-03-29 2020-11-19 Hitachi High-Tech Corporation Charge beam device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4849376A (en) * 1971-10-22 1973-07-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4849376A (en) * 1971-10-22 1973-07-12

Also Published As

Publication number Publication date
JPS5117454U (en) 1976-02-07

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