JPS5117454U - - Google Patents

Info

Publication number
JPS5117454U
JPS5117454U JP8902074U JP8902074U JPS5117454U JP S5117454 U JPS5117454 U JP S5117454U JP 8902074 U JP8902074 U JP 8902074U JP 8902074 U JP8902074 U JP 8902074U JP S5117454 U JPS5117454 U JP S5117454U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8902074U
Other languages
Japanese (ja)
Other versions
JPS5444537Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1974089020U priority Critical patent/JPS5444537Y2/ja
Publication of JPS5117454U publication Critical patent/JPS5117454U/ja
Application granted granted Critical
Publication of JPS5444537Y2 publication Critical patent/JPS5444537Y2/ja
Expired legal-status Critical Current

Links

JP1974089020U 1974-07-26 1974-07-26 Expired JPS5444537Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1974089020U JPS5444537Y2 (en) 1974-07-26 1974-07-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1974089020U JPS5444537Y2 (en) 1974-07-26 1974-07-26

Publications (2)

Publication Number Publication Date
JPS5117454U true JPS5117454U (en) 1976-02-07
JPS5444537Y2 JPS5444537Y2 (en) 1979-12-21

Family

ID=28274648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1974089020U Expired JPS5444537Y2 (en) 1974-07-26 1974-07-26

Country Status (1)

Country Link
JP (1) JPS5444537Y2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5351171U (en) * 1976-10-05 1978-05-01
JPS5366158U (en) * 1976-11-08 1978-06-03
JPS59161262U (en) * 1983-04-14 1984-10-29 日本電子株式会社 Aperture moving device
JP2015210998A (en) * 2014-04-30 2015-11-24 株式会社ホロン Ultra-high-speed electron detector and scanning electron beam inspection device incorporating detector
JPWO2019186937A1 (en) * 2018-03-29 2021-02-25 株式会社日立ハイテク Charged particle beam device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4849376A (en) * 1971-10-22 1973-07-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4849376A (en) * 1971-10-22 1973-07-12

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5351171U (en) * 1976-10-05 1978-05-01
JPS5366158U (en) * 1976-11-08 1978-06-03
JPS59161262U (en) * 1983-04-14 1984-10-29 日本電子株式会社 Aperture moving device
JP2015210998A (en) * 2014-04-30 2015-11-24 株式会社ホロン Ultra-high-speed electron detector and scanning electron beam inspection device incorporating detector
JPWO2019186937A1 (en) * 2018-03-29 2021-02-25 株式会社日立ハイテク Charged particle beam device
US11335532B2 (en) 2018-03-29 2022-05-17 Hitachi High-Tech Corporation Charged particle beam device
US11817289B2 (en) 2018-03-29 2023-11-14 Hitachi High-Tech Corporation Charged particle beam device

Also Published As

Publication number Publication date
JPS5444537Y2 (en) 1979-12-21

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